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  3. Plasma Cleaning Systems
  4. Remote plasma device (Cellback Co., Ltd.)
Remote plasma device-SLRP-01
Remote plasma device-Cellback Co., Ltd.

Remote plasma device
Cellback Co., Ltd.

About This Product

The SLRP-01, which has a unique ICP coil design, sends the electromagnetic waves necessary for gas decomposition into the decomposition chamber with little loss, and can generate high-density plasma with high efficiency.

■Can be used by attaching it to a vacuum chamber.

・O2 plasma ⇒ Organic matter removal ・Ar plasma ⇒ Surface cleaning ・CF4 plasma ⇒ Removes SiO2 etc. without damage

■Advantages of remote plasma

・Cleaning gas reduction ・Increased cleaning speed

  • Product

    Remote plasma device

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1 Models of Remote plasma device

Image Part Number Price (excluding tax) Power supply Body size Connection Control method Cooling Gas used Plasma method Chamber RF frequency
Remote plasma device-Part Number-SLRP-01

SLRP-01

Available upon quote

Main unit (AC100V), power supply (AC200V 3-phase), 50/60Hz

W350×D350×H400 (mm), 15kg

Negotiable

External input/output (relay), RS232

Water cooling

O2, Ar, CF4

ICP (inductively coupled)

AlN (aluminum nitride)

13.56MHz

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About Company Handling This Product

Cellback Co., Ltd.

  • Japan

Related search keywords

Plasma Cleaning Systems
Plasma Cleaning Systems　Cellback Co., Ltd.
Cellback Co., Ltd.

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