8-inch, 12-inch semiconductor wafer analysis X-ray photoelectron spectrometer Enviro METROS series
Tokyo Instruments, Inc
About This Product
■Summary
"Envio METROS" is an epoch-making product that breaks the conventional wisdom of X-ray photoelectron spectrometers. By changing the pressure environment from ultra-high vacuum to sub-atmospheric pressure (optional), operando measurements on biological samples, solid-liquid, and gas-solid interfaces, which were previously impossible, are now possible. In addition, with a wide variety of options such as a UPS light source, IRRAS, and SEM that can be used in sub-atmospheric pressure environments, a variety of measurements can be performed with this single device.
■Features
・Wide pressure range: UHV to NAP (5,000 Pa)
・Fully automatic from sample transport to measurement
・Multicolor X-ray source (Al, Ag, Cr)
・Entry angle: ±30°
・Depth analysis
・Measure 8 and 12 inch wafers as is
- Abundant options (Raman, IRRAS, SEM, IPES)
・User-friendly dedicated software
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Product
8-inch, 12-inch semiconductor wafer analysis X-ray photoelectron spectrometer Enviro METROS series
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Handling Company
Tokyo Instruments, Inc
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Categories
1 Models of 8-inch, 12-inch semiconductor wafer analysis X-ray photoelectron spectrometer Enviro METROS series
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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Enviro METROS LAB |
Available upon quote |
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About Company Handling This Product
- Japan