Product
Environmental control X-ray photoelectron spectrometer EnviroESCAHandling Company
Tokyo Instruments, IncCategories
Product Image | Part Number | Price (excluding tax) | Automatic control/software | Camera | Energy analyzer | Exhaust system | Gas introduction system | Introduced gas | Ion gun | Neutralizing gun | Observation camera | Sample cleaning | Sample environment pressure | Sample size | Sample stage | Spare port | X-ray source |
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EnviroESCA |
Available upon quote |
Fully automatic exhaust gas introduction system Latest software packages |
3 digital microscopes for sample observation |
Electrostatic hemispherical energy analyzer radius 150 mm Differential exhaust lens system, delay line detector up to 400 channels |
Turbo molecular pump oil free pump Chemical resistant pump system (optional) |
Two systems of gas introduced into the sample analysis section mass flow controller |
For process For purging |
Micro spot ion gun (scanning possible, 200eV~5keV) (differential pump specification) cluster gas ion gun |
Low energy electron gun (differential exhaust specification) | Digital microscope | Downstream RF plasma |
Adjust with analyzer aperture diameter (Maximum pressure 100mbar at diameter 300μm, other aperture diameters available on special order) |
Diameter 60mm Height 40mm |
High precision 3-axis stage |
DN40CF (2,75”) X2 Example) Electrical wiring, solution introduction |
Al-Kα Microfocus Monochromator Roland circle diameter 600 mm Spot size at measurement position 200μm~1mm (variable) |