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  4. Sputtering equipment ROTARIS (Media Institute Co., Ltd.)
Sputtering equipment ROTARIS-ROTARIS
Sputtering equipment ROTARIS-Media Institute Co., Ltd.

Sputtering equipment ROTARIS
Media Institute Co., Ltd.

About This Product

■Features

・Using our proprietary Rotating Substrate Module (RSM), up to 12 cathodes can be attached, and a 100mmφ cathode can uniformly form a film on a 200mmφ wafer. ・Achieve various sputtering processes in one system, such as co-sputtering, combined use of DC, and RF sputtering ・Can control ultra-thin films such as semiconductor thin films and magnetic thin films

■Application field

・HDD: TFH (Reader/Writer) ・MRAM / STT-RAM / P-MTJ ・Sensors xMR ・Bio sensor ・MEMS

  • Product

    Sputtering equipment ROTARIS

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1 Models of Sputtering equipment ROTARIS

Image Part Number Price (excluding tax)
Sputtering equipment ROTARIS-Part Number-ROTARIS

ROTARIS

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About Company Handling This Product

Media Institute Co., Ltd.

  • Japan

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