Wafer surface inspection equipment WM-10
Irie Co., Ltd.
About This Product
Wafer surface equipment WM-10 is suitable for 90-65nm process node, low price and high performance
■Features/Applications
・Achieves maximum detection sensitivity of 48nm by adopting high-output Violet-LD. Ideal for mass production and prototyping of 90-65nm process nodes.
・Space saving: Smallest class among 300mm compatible machines
・Significant reduction in running costs, 2/1 that of Ar ion lasers (compared to our company)
・Uses a 2-axis optical system that can be used in all fields from materials to device manufacturers
・Achieved 1.5 times higher throughput than previous models (compared to our company)
・Environmentally friendly and power saving, 30% less than previous models (compared to our company)
・Various options such as automatic sensitivity correction function are also available.
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Product
Wafer surface inspection equipment WM-10
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Handling Company
Irie Co., Ltd.
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Categories
1 Models of Wafer surface inspection equipment WM-10
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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WM-10 |
Available upon quote |
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About Company Handling This Product
- Japan