Highly sensitive measurement of particles on non-patterned wafers Wafer surface inspection system WM-7S
Irie Co., Ltd.
About This Product
It is capable of detecting particles on the wafer surface with high sensitivity, and is essential for maintaining yields in semiconductor manufacturing.
■Features
・High sensitivity measurement ⇒ Increased sensitivity by using short wavelength laser
・High dynamic range (Bare-Si) ⇒0.079㎛~5.0㎛
・High sensitivity stability ⇒ Reproducibility of repeated measurements 1% or less (standard deviation σ/average value of total number of particles X)
・High cost performance
・Low running cost ⇒Long life and low power consumption design by using Violet LD
■Applications
・Device mass production process: Process and process control Particle inspection and control before and after equipment maintenance Analysis and analysis using particle coordinates
・New line construction/equipment introduction Particle inspection/management after installation
・Wafer/reclaimed wafer manufacturer process/process management
・Research institutes/universities process development
・Resist/chemical/abrasive particle inspection/evaluation
・Equipment/equipment manufacturer: Particle evaluation before development, manufacturing, and shipping, etc.
■SMIF system can be installed (wafer size 200mm)
Achieve a local clean environment by combining SMIF and HEPA filters
■Various software
・XY coordinate output ⇒ Used for foreign matter analysis with SEM/AFM
・Map overlay software ⇒ Visualizes the increase and decrease of particles with respect to the reference wafer ・Checking the cleaning process ability ・Checking the increase in particles due to process equipment
・Haze measurement function ⇒ You can check the surface condition (roughness) of wafers with film
■Automatic sensitivity correction
・Automate sensitivity correction work
- Sensitivity check is possible with simple operations
・Accurate sensitivity correction is possible using a calibration wafer coated with PSL particles
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Product
Highly sensitive measurement of particles on non-patterned wafers Wafer surface inspection system WM-7S
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Handling Company
Irie Co., Ltd.
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Categories
1 Models of Highly sensitive measurement of particles on non-patterned wafers Wafer surface inspection system WM-7S
| Product Image | Part Number | Price (excluding tax) |
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WM-7S |
Available upon quote |
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About Company Handling This Product
- Japan