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ULVAC Sales Co., Ltd.'s FPD Manufacturing Equipment

ULVAC Sales Co., Ltd.

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ULVAC Sales Co., Ltd.

High-density plasma etching equipment for research and development NE-550EX

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■Summary The high-density plasma etching system NE-550EX for research and development is a magnetic field ICP (ISM=Inductively Super Magnetron) typ...


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