ULVAC Sales Co., Ltd.'s Transport Robots
5 registered Transport Robots of ULVAC Sales Co., Ltd.
ULVAC Sales Co., Ltd.
Various power supplies/robot related Vacuum transfer robot COVOT
■Summary COVOT is a high-vacuum compatible transfer robot with high rigidity and excellent positioning accuracy, designed based on many years of ex...
ULVAC Sales Co., Ltd.
Various power supplies/robot related Vacuum transfer robot COVOT-LC
■Summary COVOT-LC is a simple and affordable vacuum transfer robot that does not have a Z-axis. ■Applications ・Automatic wafer transport in vario...
ULVAC Sales Co., Ltd.
Various power supplies/robot related vacuum transfer robot COVOT-6
■Summary COVOT-6 is a vacuum transfer robot that has four independent arms and achieves high throughput. ■Applications ・Automatic wafer transport...
ULVAC Sales Co., Ltd.
Various power supplies/robot related Vacuum transfer robot Vacuum transfer platform NCH series
■Summary The NCH series is a vacuum transfer platform that combines a robot with a transfer core chamber/load lock chamber, etc. ■Applications ・A...
ULVAC Sales Co., Ltd.
Various power supplies/robot related vacuum transfer robot ELEC-RZ
■Summary ELEC-RZ is a high vacuum compatible transfer robot that is compact and low cost based on the excellent functions and performance of the CO...
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