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ULVAC Sales Co., Ltd.'s Transport Robots

ULVAC Sales Co., Ltd.

5 products found

ULVAC Sales Co., Ltd.

Various power supplies/robot related Vacuum transfer robot COVOT

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Last viewed: 5 hours ago

■Summary COVOT is a high-vacuum compatible transfer robot with high rigidity and excellent positioning accuracy, designed based on many years of ex...

ULVAC Sales Co., Ltd.

Various power supplies/robot related vacuum transfer robot COVOT-6

110+ people viewing

■Summary COVOT-6 is a vacuum transfer robot that has four independent arms and achieves high throughput. ■Applications ・Automatic wafer transport...

ULVAC Sales Co., Ltd.

Various power supplies/robot related Vacuum transfer robot COVOT-LC

120+ people viewing

■Summary COVOT-LC is a simple and affordable vacuum transfer robot that does not have a Z-axis. ■Applications ・Automatic wafer transport in vario...

ULVAC Sales Co., Ltd.

Various power supplies/robot related vacuum transfer robot ELEC-RZ

100+ people viewing

Last viewed: 50 minutes ago

■Summary ELEC-RZ is a high vacuum compatible transfer robot that is compact and low cost based on the excellent functions and performance of the CO...

ULVAC Sales Co., Ltd.

Various power supplies/robot related Vacuum transfer robot Vacuum transfer platform NCH series

110+ people viewing

■Summary The NCH series is a vacuum transfer platform that combines a robot with a transfer core chamber/load lock chamber, etc. ■Applications ・A...


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