Various power supplies/robot related power supply for film deposition/EB gun DC PULSE power supply DC-5-P/DC-10-P
ULVAC Sales Co., Ltd.
About This Product
■Summary
DC pulse power supplies are useful for arcing generated in reactive processes. This power supply improves yield and throughput by reversing the output voltage at set intervals and canceling charge accumulation on the target surface.
■Applications
・Reactive sputtering equipment for FPD
・Reactive sputtering equipment for industrial coatings
・Reactive sputtering equipment for color TFT
Features
■High throughput
High power input is possible by reducing abnormal discharge
■Reducing board damage
Possible to reduce board damage caused by arc
■Reverse pulse frequency can be changed
Possible in the range of 10kHz to 250kHz
■Large capacity possible with master/slave connection
Up to 6 units can be operated in parallel (possible on the same model)
■DC output is also possible
Can also be used as a DC power supply with ultra-low arc performance by stopping the PULSE function.
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Product
Various power supplies/robot related power supply for film deposition/EB gun DC PULSE power supply DC-5-P/DC-10-P
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Various power supplies/robot related power supply for film deposition/EB gun DC PULSE power supply DC-5-P/DC-10-P
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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DC-5-P |
Available upon quote |
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About Company Handling This Product
- Japan