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Various power supplies/robot related power supply for film deposition/EB gun DC PULSE power supply DC-5-P/DC-10-P-DC-5-P
Various power supplies/robot related power supply for film deposition/EB gun DC PULSE power supply DC-5-P/DC-10-P-ULVAC Sales Co., Ltd.

Various power supplies/robot related power supply for film deposition/EB gun DC PULSE power supply DC-5-P/DC-10-P
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours


About This Product

■Summary

DC pulse power supplies are useful for arcing generated in reactive processes. This power supply improves yield and throughput by reversing the output voltage at set intervals and canceling charge accumulation on the target surface.

■Applications

・Reactive sputtering equipment for FPD ・Reactive sputtering equipment for industrial coatings ・Reactive sputtering equipment for color TFT Features

■High throughput

High power input is possible by reducing abnormal discharge

■Reducing board damage

Possible to reduce board damage caused by arc

■Reverse pulse frequency can be changed

Possible in the range of 10kHz to 250kHz

■Large capacity possible with master/slave connection

Up to 6 units can be operated in parallel (possible on the same model)

■DC output is also possible

Can also be used as a DC power supply with ultra-low arc performance by stopping the PULSE function.

  • Product

    Various power supplies/robot related power supply for film deposition/EB gun DC PULSE power supply DC-5-P/DC-10-P

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1 Models of Various power supplies/robot related power supply for film deposition/EB gun DC PULSE power supply DC-5-P/DC-10-P

Image Part Number Price (excluding tax) Compatible standards Reverse pulse width Mass Number of phases, frequency Oscillation frequency Maximum rated power Rated current Rated voltage External control External dimensions (W×D×H) Variation range Operating environment Operating ambient temperature Control accuracy Control method Control guarantee range Cooling method Input voltage Input capacity Parallel operation
Various power supplies/robot related power supply for film deposition/EB gun DC PULSE power supply DC-5-P/DC-10-P-Part Number-DC-5-P

DC-5-P

Available upon quote

CE/SEMI F47/RoHS Directive

0.4μs~5μs selectable in 0.1μs increments

29kg

3 phase 50/60Hz

10kHz~250kHz

5kW

12.5A

650V/800V

Analog/digital, RS-232C, RS-485

483mm x 630mm x 133mm (excluding protrusions)

AC187~229V

Avoid direct sunlight, heat, dust, and vibration, and do not contain corrosive gases.

5℃~40℃ (no condensation)

±0.5% of rated output or ±1% of set value, whichever is greater

Constant power control (P control) / Constant current control (I control) / Constant voltage control (V control)

Constant power control 10~100% of rated power value

Forced air cooling

AC208V

8kVA

Up to 6 units can be controlled by master/slave (possible on the same model)

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About Company Handling This Product

Response Rate

100.0%


Response Time

125.8hrs

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