Analysis/Measurement Equipment Surface Analyzer Ion Gun/Electron Spectrometer (CMA) FIG-5 Package-FIG-5

Electron Spectrometer (CMA) FIG-5 Package
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■SummaryThis ion gun is a revolutionary ion gun that has a maximum beam current of 10 μA, a beam diameter of less than 150 μm, and a maximum current density of more than 2 mA/cm2, even though it is a compact ion gun equipped with an ICF70. Furthermore, because it is equipped with a floating mechanism, it is now possible to obtain a low-velocity ion beam with high brightness.

■Features・Compatible with ultra-high vacuum due to fully bakeable structure.
・High ion current density (>2 mA/cm2 5 kV) enables high-speed sputter etching.
・It is possible to narrow down the ion beam diameter to 150 μm or less (5 kV).
- Equipped with a floating lens, it is now possible to use ion beams from ultra-low energy (10eV) to 5keV.
・When performing differential pumping, it is possible to maintain the pressure inside the device at an ultra-high vacuum even during ion irradiation.
-Filament assembly makes filament replacement easier.
- External control allows ON/OFF of acceleration voltage and raster control (X/Y independent 0-10 V).

Model
There is 1 model available for this product.

Product
Analysis/Measurement Equipment Surface Analyzer Ion Gun/Electron Spectrometer (CMA) FIG-5 Package

Handling Company
ULVAC Sales Co., Ltd.

Categories

Measuring Equipment

Spectroscopes

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Last viewed: 10 hours ago

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1 Models of Analysis/Measurement Equipment Surface Analyzer Ion Gun/Electron Spectrometer (CMA) FIG-5 Package

Image	Part Number	Price (excluding tax)	Control power	Control mass (kg)	Control dimensions (W×H×D) (mm)	Control external control	Control acceleration voltage (kV)	Control float voltage (V)	Ion gun minimum beam diameter (μm)	Ion gun maximum beam current density (mA/cm2)	Ion gun maximum beam current (μ)	Ion gun differential pressure	Ion gun operating distance (mm)	Ion gun accelerating voltage (kV)	Ion gun slow beam current (nA)	Ion gun raster range (mm)	Ion gun filament replacement	Ion gun beam deflection (mm)	Ion gun source type
	FIG-5	Available upon quote	AC100/115V 1.5A	18.2	482×176×375	Acceleration voltage ON/OFF, raster control	0~5	0~500	200 or less	2 or more	10 or more (@5kV)	10000:1	30~70	0~5	12 (@10eV)	Max 10×10	Every 450 hours of use	Mechanical: ±5, Electrostatic: ±3	Electronic impact type

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

Japan

Analysis/Measurement Equipment Surface Analyzer Ion Gun/Electron Spectrometer (CMA) FIG-5 Package ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

About This Product

■Summary

■Features

1 Models of Analysis/Measurement Equipment Surface Analyzer Ion Gun/Electron Spectrometer (CMA) FIG-5 Package

FIG-5

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About Company Handling This Product

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Analysis/Measurement Equipment Surface Analyzer Ion Gun/Electron Spectrometer (CMA) FIG-5 Package
ULVAC Sales Co., Ltd.