Analysis and measurement equipment Surface analyzer Quadrupole secondary ion mass spectrometer (D-SIMS) PHI ADEPT-1010
ULVAC Sales Co., Ltd.
About This Product
■Summary
Secondary ion mass spectrometry (SIMS) is a method that highly sensitively measures elemental distribution in the depth direction by irradiating a sample with ions and mass spectrometry of the secondary ions released from the sample. .
ADEPT-1010 has a quadrupole mass spectrometer and is suitable for analyzing shallowly implanted dopants in semiconductors and thin multilayer films. By employing a high-brightness, low-energy floating ion gun, it is possible to perform deep-direction analysis of the extreme surface with high sensitivity and high speed.
■Features
・Achieves ultimate depth resolution by ~250 eV/Oxygen atom primary ion beam irradiation
・High transmittance secondary ion optical system significantly improves dynamic range and lower detection limit
・Fully automatic 5-axis fully automatic stage enables automatic analysis with arbitrary settings
・High sensitivity measurement possible from normal incidence to oblique incidence (oxygen leak)
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Product
Analysis and measurement equipment Surface analyzer Quadrupole secondary ion mass spectrometer (D-SIMS) PHI ADEPT-1010
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Analysis and measurement equipment Surface analyzer Quadrupole secondary ion mass spectrometer (D-SIMS) PHI ADEPT-1010
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PHI ADEPT-1010 |
Available upon quote |
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About Company Handling This Product
- Japan