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  2. Measuring Equipment
  3. Ion Analyzers
  4. Analysis and measurement equipment Surface analyzer Quadrupole secondary ion mass spectrometer (D-SIMS) PHI ADEPT-1010 (ULVAC Sales Co., Ltd.)
Analysis and measurement equipment Surface analyzer Quadrupole secondary ion mass spectrometer (D-SIMS) PHI ADEPT-1010-PHI ADEPT-1010
Analysis and measurement equipment Surface analyzer Quadrupole secondary ion mass spectrometer (D-SIMS) PHI ADEPT-1010-ULVAC Sales Co., Ltd.

Analysis and measurement equipment Surface analyzer Quadrupole secondary ion mass spectrometer (D-SIMS) PHI ADEPT-1010
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

Secondary ion mass spectrometry (SIMS) is a method that highly sensitively measures elemental distribution in the depth direction by irradiating a sample with ions and mass spectrometry of the secondary ions released from the sample. . ADEPT-1010 has a quadrupole mass spectrometer and is suitable for analyzing shallowly implanted dopants in semiconductors and thin multilayer films. By employing a high-brightness, low-energy floating ion gun, it is possible to perform deep-direction analysis of the extreme surface with high sensitivity and high speed.

■Features

・Achieves ultimate depth resolution by ~250 eV/Oxygen atom primary ion beam irradiation ・High transmittance secondary ion optical system significantly improves dynamic range and lower detection limit ・Fully automatic 5-axis fully automatic stage enables automatic analysis with arbitrary settings ・High sensitivity measurement possible from normal incidence to oblique incidence (oxygen leak)

  • Product

    Analysis and measurement equipment Surface analyzer Quadrupole secondary ion mass spectrometer (D-SIMS) PHI ADEPT-1010

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1 Models of Analysis and measurement equipment Surface analyzer Quadrupole secondary ion mass spectrometer (D-SIMS) PHI ADEPT-1010

Image Part Number Price (excluding tax) Oxygen beam Ultimate pressure Cesium beam
Analysis and measurement equipment Surface analyzer Quadrupole secondary ion mass spectrometer (D-SIMS) PHI ADEPT-1010-Part Number-PHI ADEPT-1010

PHI ADEPT-1010

Available upon quote

Sensitivity: 2×10^7cps
Beam voltage: 0.25~8kV

1.2×10^-8Pa or less

Sensitivity: 2×10^7cps
Beam voltage: 0.25~11kV

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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