Analysis and measurement equipment Surface analyzer Time-of-flight secondary ion mass spectrometer (TOF-SIMS) PHI nanoTOF II™
ULVAC Sales Co., Ltd.
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About This Product
■Summary
The nanoTOF II inherits the triple focus electrostatic analyzer (TRIFT type analyzer) with excellent ion transmission characteristics, but its basic performance has been significantly improved with a new primary ion gun. Furthermore, the updated software provides a comfortable operating environment. This is a state-of-the-art TOF-SIMS that allows you to choose from a wide variety of options depending on your purpose.
■Features
・TOF-SIMS is being used not only in the field of basic research, but also in a wide range of fields such as product evaluation and failure analysis.
・Instead of just flat samples made in test cases, commercialized samples with complex structures, for example, are now being evaluated.
・This product is a practical TOF-SIMS device that uses the optical features of TRIFT to be most effective when dealing with irregularities and shapes on sample surfaces, as well as samples with complex conductors and insulators.
■TRIFT™ analyzer suitable for samples with complex shapes
The triple focus electrostatic analyzer (TRIFT type analyzer) has a wide energy bandpass and a large solid angle of acquisition to simultaneously achieve high mass resolution and high detection sensitivity measurements. Furthermore, the deep depth of focus exceeding 100 μm enables imaging that is less affected by shape.
Primary ion gun that realizes high-precision measurement
■New ion gun achieves minimum beam diameter of 70 nm or less
Ion sources can be selected from gallium, gold, and bismuth.
■Performance of newly developed primary ion gun
The newly developed primary ion gun enables a minimum spatial resolution of 70 nm or less. Furthermore, by adopting a newly designed pulse compression (bunching) mechanism, we have simultaneously improved sensitivity, spatial resolution, and mass resolution.
■Molecular distribution observation is possible with an analytical field of view of 5 μm
It is now possible to clearly observe the phase separation structure in the submicron region, which was conventionally observed using AFM, as a molecular distribution.
■Clear images can be obtained even in high mass resolution mode
nanoTOF II simultaneously achieves high sensitivity, high spatial resolution, and high mass resolution over a wide mass range, providing clearer molecular imaging.
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Product
Analysis and measurement equipment Surface analyzer Time-of-flight secondary ion mass spectrometer (TOF-SIMS) PHI nanoTOF II™
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Analysis and measurement equipment Surface analyzer Time-of-flight secondary ion mass spectrometer (TOF-SIMS) PHI nanoTOF II™
| Product Image | Part Number | Price (excluding tax) |
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PHI nanoTOF II™ |
Available upon quote |
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About Company Handling This Product
- Japan