Basic process gas monitor Qulee BGM2 series
ULVAC Sales Co., Ltd.
About This Product
■Summary
ULVAC's new residual gas analyzer (compatible with Ethernet communication) is revolutionary in its simplicity and ease of use. Introducing a new standard for process monitors based on the voices of equipment engineers on various production lines. Ideal for equipment management of vacuum evaporation equipment and various vacuum furnaces.
■Applications
・Residual gas analysis of organic EL devices
・Residual gas analysis of various manufacturing equipment such as solar cells, FPDs, semiconductors, etc.
・Residual gas analysis of film forming equipment such as PVD equipment and vacuum evaporation equipment
・Residual gas analysis of winding vapor deposition equipment
・Residual gas analysis of high vacuum exhaust equipment
・Residual gas analysis of freeze drying equipment
・Various gas analysis for research and development
■Features
・Excellent cost performance
・Ideal for RGA applications
・Communication interface
・Supports Ethernet communication
・Integrated display design
・Measurement possible without a PC
・Easy operation: One Click function (easy for anyone, no complicated operations required)
・Baking compatible
・High temperature baking of up to 120℃ is possible when the sensor unit is connected (sensor unit separated state: 250℃)
・Equipped with degas function
・Adoption of electron impact desorption method
・Enhancement of preventive maintenance functions
・Preventive maintenance of ion sources and secondary electron multipliers
・Equipped with traceability function for analysis tubes (Patent No. 5016031)
・Enhanced leak test function
・Helium leak test, air leak test, build-up test possible
・Total pressure measurement
・Capable of measuring total pressure
・Qulee QCS compatible
・Software included as standard (compatible with Windows 7/8/10)
・Compatible standards
・CE standard compatible
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Product
Basic process gas monitor Qulee BGM2 series
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Basic process gas monitor Qulee BGM2 series
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Basic process gas monitor Qulee BGM2 series |
Available upon quote |
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About Company Handling This Product
- Japan