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Compact process gas monitor Qulee CGM2 series-CGM2-051
Compact process gas monitor Qulee CGM2 series-ULVAC Sales Co., Ltd.

Compact process gas monitor Qulee CGM2 series
ULVAC Sales Co., Ltd.


About This Product

■Summary

ULVAC's new residual gas analyzer/process gas monitor (RGA) provides high precision and high resolution under high pressure (1 Pa or less) with revolutionary simplicity and ease of use. Introducing a new standard for process monitors based on the voices of equipment engineers on various production lines. Ideal for process control (improving quality and yield) of sputtering equipment.

■Applications

・For residual gas analysis, process monitoring, and impurity (H2O) management of sputtering equipment ・For leak testing of various vacuum devices

■Features

・Support for Ethernet communication ・Integrated display design...Can be measured without a computer ・Easy operation - One Click function...Easy for anyone, no complicated operations required ・No need for differential pumping system for process monitoring...Can measure 1Pa or less, saving space. ・Enhanced leak test function ・Capable of measuring total pressure ・Qulee QCS software is included as standard ・CE standard compatible

  • Product

    Compact process gas monitor Qulee CGM2 series

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1 Models of Compact process gas monitor Qulee CGM2 series

Image Part Number Price (excluding tax) Power supply voltage Compatible standards Communication interface Mass number range Mass separation method Detector Minimum detection partial pressure Maximum working pressure Maximum baking temperature (when sensor unit is removed) Maximum baking temperature (when connected to sensor unit) Sensitivity Resolution Total pressure measurement function Operating temperature range Linearity Software One Click leak check function
Compact process gas monitor Qulee CGM2 series-Part Number-CGM2-051

CGM2-051

Available upon quote

DC24V±10%, 50W

C.E.

Ethernet communication compatible

1~50 amu

Quadrupole mass spectrometer

Faraday cup

1x10^-7Pa

2Pa

250℃

120℃

0.1uA/Pa

M/△M=1M (10% P.H.)

Can be

10~40℃

1Pa

Qulee QCS Ver.4.0 or later (compatible with Windows 7, 8, 10)

Yes/He/H2O/N2/O2/Any gas

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