Compact process gas monitor Qulee CGM2 series
ULVAC Sales Co., Ltd.
About This Product
■Summary
ULVAC's new residual gas analyzer/process gas monitor (RGA) provides high precision and high resolution under high pressure (1 Pa or less) with revolutionary simplicity and ease of use. Introducing a new standard for process monitors based on the voices of equipment engineers on various production lines. Ideal for process control (improving quality and yield) of sputtering equipment.
■Applications
・For residual gas analysis, process monitoring, and impurity (H2O) management of sputtering equipment
・For leak testing of various vacuum devices
■Features
・Support for Ethernet communication
・Integrated display design...Can be measured without a computer
・Easy operation - One Click function...Easy for anyone, no complicated operations required
・No need for differential pumping system for process monitoring...Can measure 1Pa or less, saving space.
・Enhanced leak test function
・Capable of measuring total pressure
・Qulee QCS software is included as standard
・CE standard compatible
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Product
Compact process gas monitor Qulee CGM2 series
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Compact process gas monitor Qulee CGM2 series
| Product Image | Part Number | Price (excluding tax) | Communication interface | Compatible standards | Detector | Linearity | Mass number range | Mass separation method | Maximum baking temperature (when connected to sensor unit) | Maximum baking temperature (when sensor unit is removed) | Maximum working pressure | Minimum detection partial pressure | One Click leak check function | Operating temperature range | Power supply voltage | Resolution | Sensitivity | Software | Total pressure measurement function |
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CGM2-051 |
Available upon quote | Ethernet communication compatible | C.E. | Faraday cup | 1Pa | 1~50 amu | Quadrupole mass spectrometer | 120℃ | 250℃ | 2Pa | 1x10^-7Pa | Yes/He/H2O/N2/O2/Any gas | 10~40℃ | DC24V±10%, 50W | M/△M=1M (10% P.H.) | 0.1uA/Pa | Qulee QCS Ver.4.0 or later (compatible with Windows 7, 8, 10) | Can be |
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About Company Handling This Product
- Japan