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  4. Temperature Programmed Desorption Gas Analyzer TDS-M202R (ULVAC Sales Co., Ltd.)
Temperature Programmed Desorption Gas Analyzer TDS-M202R-TDS-M202R
Temperature Programmed Desorption Gas Analyzer TDS-M202R-ULVAC Sales Co., Ltd.

Temperature Programmed Desorption Gas Analyzer TDS-M202R
ULVAC Sales Co., Ltd.

About This Product

■Summary

Qualitative analysis of desorbed gas using a mass spectrometer While heating the sample using an infrared gold image furnace, the relationship between sample temperature and released gas is analyzed using a quadrupole mass spectrometer.

■Applications

・Evaluation of various vacuum materials such as vacuum grease and O-rings ・Evaluation of semiconductor wafers and chips ・Trace gas analysis of alloys, ceramics, solid materials, etc.

■Features

・Mass spectrometry measurement is possible in a high vacuum of 10^-5 Pa. - The quartz reaction tube has a cold wall and releases almost no gas due to infrared lamp heating. - Has a wide setting range from high-speed heating to low-speed heating, allowing multi-step heating and cycle heating.

  • Product

    Temperature Programmed Desorption Gas Analyzer TDS-M202R

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1 Models of Temperature Programmed Desorption Gas Analyzer TDS-M202R

Image Part Number Price (excluding tax) Sample size Measurement atmosphere Measuring physical properties Temperature range
Temperature Programmed Desorption Gas Analyzer TDS-M202R-Part Number-TDS-M202R

TDS-M202R

Available upon quote

20mm square x 2mmH

In vacuum

Qualitative gas analysis

Room temperature~1,000℃ (MAX1,200℃)

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ULVAC Sales Co., Ltd.

  • Japan

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