Temperature Programmed Desorption Gas Analyzer TDS-M202R
ULVAC Sales Co., Ltd.
About This Product
■Summary
Qualitative analysis of desorbed gas using a mass spectrometer While heating the sample using an infrared gold image furnace, the relationship between sample temperature and released gas is analyzed using a quadrupole mass spectrometer.
■Applications
・Evaluation of various vacuum materials such as vacuum grease and O-rings
・Evaluation of semiconductor wafers and chips
・Trace gas analysis of alloys, ceramics, solid materials, etc.
■Features
・Mass spectrometry measurement is possible in a high vacuum of 10^-5 Pa.
- The quartz reaction tube has a cold wall and releases almost no gas due to infrared lamp heating.
- Has a wide setting range from high-speed heating to low-speed heating, allowing multi-step heating and cycle heating.
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Product
Temperature Programmed Desorption Gas Analyzer TDS-M202R
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Temperature Programmed Desorption Gas Analyzer TDS-M202R
| Product Image | Part Number | Price (excluding tax) | Measurement atmosphere | Measuring physical properties | Sample size | Temperature range |
|---|---|---|---|---|---|---|
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TDS-M202R |
Available upon quote | In vacuum | Qualitative gas analysis | 20mm square x 2mmH | Room temperature~1,000℃ (MAX1,200℃) |
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About Company Handling This Product
- Japan