Analysis/Measurement Equipment Vacuum Gauge Transducer Type G-TRAN Series Pirani Gauge SP1
ULVAC Sales Co., Ltd.
About This Product
■Summary
The sensor unit (SP1) is a Pirani gauge type measurement unit of the G-TRAN series. The sensor unit has a structure in which the probe and circuit are integrated (the probe can be replaced), making it a vacuum gauge suitable for cost reduction and space saving.
■Applications
・For process control in low vacuum areas of various manufacturing equipment including semiconductors and electronic components
・For process control in low vacuum areas of various industrial equipment such as furnaces
・For process control in the low vacuum region of various manufacturing equipment with many process chambers such as in-line type and single wafer type
■Features
・Transducer specifications: When a pressure indicator is not required, it reduces the cost of vacuum gauges, saves space around the control panel, and reduces wiring.
・Easy to replace probe
・Platinum, which is highly corrosion resistant, is used for the filament material.
・You can use the probes you have been using (SP1: WP-01, 02, 03, 16) as is.
・Can output 2 set points
・SP1: Pressure is output from 0 to 5V (nonlinear output)
・Power supply voltage: Can operate with DC24V input
■Points to note when purchasing
Please specify the type of probe.
*The gauge head model changes depending on the mounting arrangement (size, shape).
1. WP-01 (Φ18 gauge port)
2. WP-02 (Φ15 gauge port)
3.WP-03 (Rc 3/8 PT screw)
4.WP-16 (NW16)
*Display and display unit cable (SP1⇔display unit) are sold separately.
*Please specify the cable length.
*Display: ISG1, IM1R1, IM2R2
*Display unit cable: 2m, 5m, 10m, 15m, 20m, 25m, 30m, 35m, 40m, 45m, 50m, 60m, 70m, 80m, 90m, 100m
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Product
Analysis/Measurement Equipment Vacuum Gauge Transducer Type G-TRAN Series Pirani Gauge SP1
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Analysis/Measurement Equipment Vacuum Gauge Transducer Type G-TRAN Series Pirani Gauge SP1
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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SP1 |
Available upon quote |
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About Company Handling This Product
- Japan