Analysis/Measurement Equipment Vacuum Gauge Transducer Type G-TRAN Series Atmospheric Pressure Pirani Gauge SW1-1/SW1-2
ULVAC Sales Co., Ltd.
About This Product
■Summary
Pirani vacuum gauge that can measure a wide range from atmospheric pressure to 5×10^-2Pa. Furthermore, this vacuum gauge removes the operation and display parts from the conventional controller (sensor unit), reducing the functionality to the bare minimum, making it possible to reduce costs and save space.
■Applications
・Various manufacturing including solar cells, FPDs, semiconductors, and electronic components
・For process control in the low vacuum area of equipment
・For process control in low vacuum areas of various industrial equipment such as furnaces
・Various types with many process chambers such as in-line type and single wafer type
・For process control in low vacuum areas of manufacturing equipment
・For various vacuum exhaust lines with vibrations and shocks
■Features
・Wide area measurement: Can measure a wide area from atmospheric pressure to 5×10^-2Pa
・Improved impact resistance: Designed structure with high impact resistance (patent pending)
・Excellent atmospheric pressure accuracy: Accuracy is within ±20% regardless of the mounting orientation of the vacuum gauge (Patent No. 4878289)
・Filament material ・Platinum (Pt): Platinum, which has high corrosion resistance, is used for the filament material.
・Improved visibility: Equipped with an LED that allows you to check for abnormalities
・One-touch adjustment possible: Atmospheric pressure adjustment and zero point adjustment are possible with one touch.
・Maintenance: Easy to replace probe
・Expansion of applicable probes: In addition to NW16/25 specifications, Φ15/18 specifications, conflat flange specifications, and taper thread R1/8 specifications have been added to the lineup.
・Measurement value output signal: Pressure is equipped as standard with log output of 0 to 10V
・Control output signal: 2 set points can be output (SW1-1)
・Serial communication specifications: RS-232C/RS-485 communication possible (SW1-2)
・Compliant standards: Compliant with CE standards
■Points to note when purchasing
・Display and display unit cable (SP1⇔display unit) are sold separately.
・Please specify the cable length.
・Display: ISG1, IM1R1, IM2R2
・Display unit cable: 2m, 5m, 10m, 15m, 20m, 25m, 30m, 35m, 40m, 45m, 50m, 60m, 70m, 80m, 90m, 100m
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Product
Analysis/Measurement Equipment Vacuum Gauge Transducer Type G-TRAN Series Atmospheric Pressure Pirani Gauge SW1-1/SW1-2
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Analysis/Measurement Equipment Vacuum Gauge Transducer Type G-TRAN Series Atmospheric Pressure Pirani Gauge SW1-1/SW1-2
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
SW1-1 |
Available upon quote |
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About Company Handling This Product
- Japan