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  4. Turbo molecular pump UTM70B (ULVAC Sales Co., Ltd.)
Turbo molecular pump UTM70B-UTM70B
Turbo molecular pump UTM70B-ULVAC Sales Co., Ltd.

Turbo molecular pump UTM70B
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

This is a composite vane-type turbomolecular pump that uses ceramic ball bearings. Achieves space savings by integrating the controller and pump. The excellent high back pressure characteristics also make it possible to downsize the auxiliary pump.

■Applications

・Main exhaust system for analysis equipment, research and development equipment, experimental equipment, etc. ・Main exhaust system for vapor deposition equipment, sputtering equipment, etc. ・Main exhaust system for light gases such as H2 and He

■Free installation direction

Since there are no restrictions on the mounting direction, there is greater freedom in device design.

■Equipped with onboard controller

The controller is mounted on the turbo body, which is effective in reducing wiring and downsizing the exhaust system.

■High compression ratio/high exhaust pressure

It has a high compression ratio and can operate with high back pressure, making it possible to downsize the auxiliary pump.

■3 types of flanges available

Three types of intake flange can be selected: VG65, ICF114, and ISO63-K.

■Clean vacuum

The pump is designed to minimize backflow of hydrocarbons not only during operation but also when the pump is stopped.

■Low noise

The noise level during no-load operation is less than 48dB. (Measured values ​​for ISO63-K flange type.)

  • Product

    Turbo molecular pump UTM70B

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1 Models of Turbo molecular pump UTM70B

Image Part Number Price (excluding tax)
Turbo molecular pump UTM70B-Part Number-UTM70B

UTM70B

Available upon quote

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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