Sputter ion pump controller GST-07L Ver.B-GST-07L Ver.B

Sputter ion pump controller GST-07L Ver.B
ULVAC Sales Co., Ltd.

About This Product

■SummaryGST-07L-B is a sputter ion pump control that has achieved high functionality and reliability thanks to ULVAC's extensive technical capabilities and track record in the ultra-high vacuum field.

■Applications・Accelerator
・Electron microscope
・Analytical equipment

■Small and lightweightMulti-functionality with built-in CPU. This single unit can control all sputter ion pumps (PST series).

■Communication equipment standard equipmentEquipped with an external communication control function as standard, allowing remote control and automated operation.

■XHV compatibleEquipped with an automatic start-up circuit and soft-start function to minimize contamination of the pump cell. (→Patent No. 1340297 and others pending)

■Improved safety functionsEquipped with a function to prevent erroneous operation of the operation switch and various protective interlock functions. Adopts high-voltage fluorocarbon resin cable with excellent heat resistance, cold resistance, and electrical properties. Compliant with restrictions on the use of specific hazardous substances (RoHS Directive). Compatible with CE marking.

Model
There is 1 model available for this product.

Product
Sputter ion pump controller GST-07L Ver.B

Handling Company
ULVAC Sales Co., Ltd.

Categories

Semiconductor Manufacturing

Ion Implanters

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Last viewed: 12 hours ago

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1 Models of Sputter ion pump controller GST-07L Ver.B

Image	Part Number	Price (excluding tax)	Mass	Display method	Display contents	Combination pump	Humidity range	Temperature range	External dimensions WxHxD	Pressure display	Pressure set point	Operating pressure	Output current display	Output current	Output voltage display	Output open voltage	Input voltage/current	Protection function	REMOTE/LOCAL	MONITOR terminal output signal	Accessories
	GST-07L Ver.B	Available upon quote	Body: Approx. 4kg	Digital display (7 segment LED display)	Digital display (7 segment LED display)	Actor pump (all PST series)	85% or less (no condensation)	0~40℃	W240×H99×D370mm (excluding rack mounting brackets)	Pa, mbr (1×10^-8~1×10^-2Pa) (1×10^-10~1×10^-4mbar)	2 points	10^-2 to 10^-4Pa or less	Automatic switching of 2 ranges of mA.μA (LINEAR display)	DC31mA or less	DC0.0~7.5kV (H or L) (1 range LINEAR display)	DC+7.5kV (H.L 2-point setting can be changed using the switch on the panel. H.L setting voltage is variable by volume of approximately 1.0~7.5kV)	AC100~115V±10% • 50/60Hz • 3.0A AC200~240V±10% • 50/60Hz • 1.5A	Equipped with error display/various protection functions High voltage (HV) output is cut off when the display lights up (ERR 0~8) Startup protection timer settings (Variable from 1 to 255 minutes) Automatic recovery possible after power outage (HV-HOLD switch operation)	Switchable by front panel switch	Outputs a signal proportional to the panel 7 segment display Each range DC0~10V F.S. 100kΩ or more	Input cable 3m

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Japan

Sputter ion pump controller GST-07L Ver.B ULVAC Sales Co., Ltd.

About This Product

■Summary

■Applications

■Small and lightweight

■Communication equipment standard equipment

■XHV compatible

■Improved safety functions

1 Models of Sputter ion pump controller GST-07L Ver.B

GST-07L Ver.B

Customers who viewed this product also viewed

Other products of ULVAC Sales Co., Ltd.

About Company Handling This Product

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Sputter ion pump controller GST-07L Ver.B
ULVAC Sales Co., Ltd.