Medium current ion implanter for research and development IMX-3500
ULVAC Sales Co., Ltd.
About This Product
■Summary
The medium current ion implanter IMX-3500 is an ion implanter with a maximum energy of 200kV and a wafer size of up to 8 inches, making it ideal for research and development at universities.
■Features
- Equipped with a platen that can handle irregularly shaped substrates with a maximum wafer size of 8 inches.
- In addition to gas sources, solid evaporation sources can also be used for ion sources that are easy to handle safely for B, P, and As ions.
-The HV terminal part has the same configuration as mass-produced equipment, ensuring high reliability.
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Product
Medium current ion implanter for research and development IMX-3500
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Medium current ion implanter for research and development IMX-3500
| Product Image | Part Number | Price (excluding tax) | Energy | Ionic species | Maximum beam current | Minimum beam current |
|---|---|---|---|---|---|---|
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IMX-3500 |
Available upon quote | 30~200keV (3~200keV available as option) | B, P, As, Si, Ge, Sb, In, etc. |
11B+400μA (200keV) 31P+600μA (200keV) |
150nA |
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About Company Handling This Product
- Japan