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  3. Ion Implanters
  4. High temperature ion implanter for SiC IH-860DSIC (ULVAC Sales Co., Ltd.)
High temperature ion implanter for SiC IH-860DSIC-IH-860DSIC
High temperature ion implanter for SiC IH-860DSIC-ULVAC Sales Co., Ltd.

High temperature ion implanter for SiC IH-860DSIC
ULVAC Sales Co., Ltd.

About This Product

■Summary

This is a high-energy ion implanter for SiC mass production equipped with a high-temperature ESC.

■Applications

Ion implanter for SiC

■Features

・Automatic continuous high temperature treatment injection possible ・Possible to implant up to 350keV for monovalent ions and 700keV for doubly charged ions (optional support up to 430keV for monovalent ions and 860keV for doubly charged ions) - Achieved high throughput with dual end stations (A system 4" high temperature ESC / B system 3" high temperature ESC, A system 6" high temperature ESC / B system 6" room temperature ESC, etc. It is possible to build specifications according to customer's wishes. ) - Chain injection possible, reducing operator burden ・Compact design ・Available for a wide range of applications from prototype to mass production

  • Product

    High temperature ion implanter for SiC IH-860DSIC

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1 Models of High temperature ion implanter for SiC IH-860DSIC

Image Part Number Price (excluding tax)
High temperature ion implanter for SiC IH-860DSIC-Part Number-IH-860DSIC

IH-860DSIC

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About Company Handling This Product

ULVAC Sales Co., Ltd.

  • Japan

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Ion Implanters
Ion Implanters　ULVAC Sales Co., Ltd.
ULVAC Sales Co., Ltd.

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