High temperature ion implanter for SiC IH-860DSIC
ULVAC Sales Co., Ltd.
About This Product
■Summary
This is a high-energy ion implanter for SiC mass production equipped with a high-temperature ESC.
■Applications
Ion implanter for SiC
■Features
・Automatic continuous high temperature treatment injection possible
・Possible to implant up to 350keV for monovalent ions and 700keV for doubly charged ions (optional support up to 430keV for monovalent ions and 860keV for doubly charged ions)
- Achieved high throughput with dual end stations (A system 4" high temperature ESC / B system 3" high temperature ESC, A system 6" high temperature ESC / B system 6" room temperature ESC, etc. It is possible to build specifications according to customer's wishes. )
- Chain injection possible, reducing operator burden
・Compact design
・Available for a wide range of applications from prototype to mass production
-
Product
High temperature ion implanter for SiC IH-860DSIC
-
Handling Company
ULVAC Sales Co., Ltd.
-
Categories
1 Models of High temperature ion implanter for SiC IH-860DSIC
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
|
|
IH-860DSIC |
Available upon quote |
Customers who viewed this product also viewed
Other products of ULVAC Sales Co., Ltd.
View more products of ULVAC Sales Co., Ltd.
About Company Handling This Product
- Japan