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  3. Ion Implanters
  4. High temperature ion implanter for SiC IH-860DSIC (ULVAC Sales Co., Ltd.)
High temperature ion implanter for SiC IH-860DSIC-IH-860DSIC
High temperature ion implanter for SiC IH-860DSIC-ULVAC Sales Co., Ltd.

High temperature ion implanter for SiC IH-860DSIC
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

This is a high-energy ion implanter for SiC mass production equipped with a high-temperature ESC.

■Applications

Ion implanter for SiC

■Features

・Automatic continuous high temperature treatment injection possible ・Possible to implant up to 350keV for monovalent ions and 700keV for doubly charged ions (optional support up to 430keV for monovalent ions and 860keV for doubly charged ions) - Achieved high throughput with dual end stations (A system 4" high temperature ESC / B system 3" high temperature ESC, A system 6" high temperature ESC / B system 6" room temperature ESC, etc. It is possible to build specifications according to customer's wishes. ) - Chain injection possible, reducing operator burden ・Compact design ・Available for a wide range of applications from prototype to mass production

  • Product

    High temperature ion implanter for SiC IH-860DSIC

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1 Models of High temperature ion implanter for SiC IH-860DSIC

Image Part Number Price (excluding tax)
High temperature ion implanter for SiC IH-860DSIC-Part Number-IH-860DSIC

IH-860DSIC

Available upon quote

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

Related search keywords

Ion Implanters
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ULVAC Sales Co., Ltd.

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