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Medium current ion implanter SOPHI-200/260-SOPHI-200
Medium current ion implanter SOPHI-200/260-ULVAC Sales Co., Ltd.

Medium current ion implanter SOPHI-200/260
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours


About This Product

■Summary

The medium current ion implanter SOPHI-200/260 is an 8, 6, and 5 inch ion implanter equipped with the latest technology. We are accepting sampling.

■Applications

・Semiconductors, electronic parts ・Thin substrate process for power devices, SiC process ・R&D

■Features

・The ultimate parallel beam ion implanter equipped with cutting-edge technology. ・Low price, low running cost ・Small and lightweight ・Direct transfer of ultra-thin wafers possible

  • Product

    Medium current ion implanter SOPHI-200/260

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1 Models of Medium current ion implanter SOPHI-200/260

Image Part Number Price (excluding tax) Uniformity Beam parallelism Energy range
Medium current ion implanter SOPHI-200/260-Part Number-SOPHI-200

SOPHI-200

Available upon quote

0.5% or less

0.2° or less

3~200keV

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About Company Handling This Product

Response Rate

100.0%


Response Time

125.8hrs

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