Medium current ion implanter SOPHI-200/260
ULVAC Sales Co., Ltd.
About This Product
■Summary
The medium current ion implanter SOPHI-200/260 is an 8, 6, and 5 inch ion implanter equipped with the latest technology. We are accepting sampling.
■Applications
・Semiconductors, electronic parts
・Thin substrate process for power devices, SiC process
・R&D
■Features
・The ultimate parallel beam ion implanter equipped with cutting-edge technology.
・Low price, low running cost
・Small and lightweight
・Direct transfer of ultra-thin wafers possible
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Product
Medium current ion implanter SOPHI-200/260
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Medium current ion implanter SOPHI-200/260
| Product Image | Part Number | Price (excluding tax) | Beam parallelism | Energy range | Uniformity |
|---|---|---|---|---|---|
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SOPHI-200 |
Available upon quote | 0.2° or less | 3~200keV | 0.5% or less |
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About Company Handling This Product
- Japan