Ion implanter SOPHI-400
ULVAC Sales Co., Ltd.
About This Product
■Summary
This is a high energy ion implanter that can handle up to 2,400KeV.
■Applications
Thin substrate process for power devices, IGBT process
■Features
・Single wafer type
・Compatible with thin wafer
・Parallel beam
-
Product
Ion implanter SOPHI-400
-
Handling Company
ULVAC Sales Co., Ltd.
-
Categories
1 Models of Ion implanter SOPHI-400
| Product Image | Part Number | Price (excluding tax) | Board size | Maximum voltage |
|---|---|---|---|---|
|
|
SOPHI-400 |
Available upon quote | Max200mm | 2,400keV |
Customers who viewed this product also viewed
Other products of ULVAC Sales Co., Ltd.
View more products of ULVAC Sales Co., Ltd.
About Company Handling This Product
- Japan