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Ion implanter SOPHI-400-SOPHI-400
Ion implanter SOPHI-400-ULVAC Sales Co., Ltd.

Ion implanter SOPHI-400
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours


About This Product

■Summary

This is a high energy ion implanter that can handle up to 2,400KeV.

■Applications

Thin substrate process for power devices, IGBT process

■Features

・Single wafer type ・Compatible with thin wafer ・Parallel beam

  • Product

    Ion implanter SOPHI-400

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1 Models of Ion implanter SOPHI-400

Image Part Number Price (excluding tax) Maximum voltage Board size
Ion implanter SOPHI-400-Part Number-SOPHI-400

SOPHI-400

Available upon quote

2,400keV

Max200mm

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About Company Handling This Product

Response Rate

100.0%


Response Time

125.8hrs

  • Japan

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