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  3. Ion Implanters
  4. Ion implanter SOPHI-30 (ULVAC Sales Co., Ltd.)
Ion implanter SOPHI-30-SOPHI-30
Ion implanter SOPHI-30-ULVAC Sales Co., Ltd.

Ion implanter SOPHI-30
ULVAC Sales Co., Ltd.

About This Product

■Summary

This is an ion implanter that supports low acceleration and high concentration.

■Applications

Thin substrate process for power devices, IGBT process

■Features

・Single wafer type ・Compatible with thin wafer

■Non-mass separator *Compared advantages of non-mass separator

1) High-throughput ion implanter capable of low acceleration and high concentration 2) Lower price, about half the price than before 3) Compact design with 1/3 the area occupied by conventional equipment

  • Product

    Ion implanter SOPHI-30

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1 Models of Ion implanter SOPHI-30

Image Part Number Price (excluding tax) Board size
Ion implanter SOPHI-30-Part Number-SOPHI-30

SOPHI-30

Available upon quote

Max200mm

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About Company Handling This Product

ULVAC Sales Co., Ltd.

  • Japan

Related search keywords

Ion Implanters
Ion Implanters　ULVAC Sales Co., Ltd.
ULVAC Sales Co., Ltd.

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