Ion implanter SOPHI-30
ULVAC Sales Co., Ltd.
About This Product
■Summary
This is an ion implanter that supports low acceleration and high concentration.
■Applications
Thin substrate process for power devices, IGBT process
■Features
・Single wafer type
・Compatible with thin wafer
■Non-mass separator *Compared advantages of non-mass separator
1) High-throughput ion implanter capable of low acceleration and high concentration
2) Lower price, about half the price than before
3) Compact design with 1/3 the area occupied by conventional equipment
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Product
Ion implanter SOPHI-30
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Ion implanter SOPHI-30
| Product Image | Part Number | Price (excluding tax) | Board size |
|---|---|---|---|
|
|
SOPHI-30 |
Available upon quote | Max200mm |
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About Company Handling This Product
- Japan