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COBRA SEMICON-COBRA BC 0101 G 50Hz
COBRA SEMICON-COBRA BC 0601 G 50Hz
COBRA SEMICON-COBRA DS 0080 G 50Hz
COBRA SEMICON-COBRA DS 0600 E 50Hz
COBRA SEMICON-COBRA DS 0700 G 50Hz
COBRA SEMICON-COBRA DS 1200 A 50Hz
COBRA SEMICON-COBRA DS 2141 A 50Hz
COBRA SEMICON-BUSCH VACUUM SOLUTIONS

BUSCH VACUUM SOLUTIONS's Response Status

Response Rate

100.0%

Response Time

55.3hours


About This Product

Dryscrew vacuum pump COBRA SEMICON Dry Sesugu Crystal vacuum pump is an ideal option for a very difficult process, such as solar modules, flat panels, semiconductors, and various industrial coating applications. The operation principle of COBRA SEMICON is based on the state -of -the -art screw technology. Patent acquired self -balancing screws have set new standards in efficiency. COBRA SEMICON has a high exhaust ability with excellent beeps and powder, so there is no problem in sucking gas containing powder. Dry and non -contact -type operation principles have realized low maintenance, low -operating costs, and longevity. COBRA Semicon is compact and can be easily installed in a limited space. Operating principle Inside the COBRA SEMICON Dry Sesuku Cryste vacuum pump, two screw -type rotors rotate in the opposite direction. The sucked gas is captured between the cylinder and the screw chamber and is carried to the exhaust port while being compressed. During this process, screw rotors do not come into contact with each other or contact cylinders. Benefits of COBRA BC series COBRA BC vacuum pump is ideal for use for road rock and transfercanbar. Other uses include metrology, lithography, PVD, rapid thermal process, and silicon etching. Patent acquired self -balancing screw design realizes low vibration and quiet operation. The screw of the COBRA BC vacuum pump has no seams because it is an integrated casting. Therefore, process fluids and particles do not enter the gap. This prevents corrosion and sediment. The twin rotor of the COBRA BC vacuum pump inequality screw is fixed only on the motor side because of the bell -shaped cantilever structure. Because of its own "flying bearing" design, there is no need for bearing on the intake entrance side. Therefore, the sucking gas does not contact the bearing. This secures a clean vacuum generation and can completely recover the sucked gas. Since the vacuum pump of the COBRA BC series adopts an efficient direct water -cooled system, the temperature of the entire vacuum pump is uniformly maintained, and the thermal stability is maintained throughout the process. You can control all functions with a completely open communication protocol (Modbus TCP-IP). This includes idling mode and variable speed drive. This communication protocol makes it easy to adapt to specific networks using a general interface. The COBRA BC series is very compact because of the directly connected candy motor. Because the design is not selected, it can be easily and promptly retrofitted to existing systems. Ideal solution for semiconductor lights to medium processes ・ Advanced screw design ・ Dry and non -contact type operation principle ・ Unique flying bearing design ・ Conte river structure ・ Compact design that does not select the installation location ・ Direct water -cooled system ・ Completely open communication protocol

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    COBRA SEMICON

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46 Models of COBRA SEMICON

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Achievement vacuum Amount of water used Power consumption (at the time of reach of reach) Rated motor output Design exhaust speed mass Rated motor rotation speed External dimensions (LXWXH) Noise value (ISO2151) Gas outlet Gas -inlet Nitrogen consumption Rated motor output (back pump) Rated motor output (mechanical booster) Power consumption (in idol mode) Rated motor rotation (back pump) Rated motor rotation (mechanical booster)
COBRA SEMICON-Part Number-COBRA BC 0101 G 50Hz

COBRA BC 0101 G 50Hz

Available upon quote

0.01HPa (MBAR)

1.0L/min

1.1kw

1.8kw

100m³/h

115kg

3600min⁻¹

520x300x340mm

58db (a)

DN40KF

DN50KF

- - - - - -
COBRA SEMICON-Part Number-COBRA BC 0101 G 60Hz

COBRA BC 0101 G 60Hz

Available upon quote

0.01HPa (MBAR)

1.0L/min

1.1kw

1.8kw

100m³/h

115kg

3600min⁻¹

520x300x340mm

58db (a)

DN40KF

DN50KF

- - - - - -
COBRA SEMICON-Part Number-COBRA BC 0601 G 50Hz

COBRA BC 0601 G 50Hz

Available upon quote

0.003HPa (MBAR)

Minimum 3.0 --4.0L/min

1.7kw

-

550m³/h

315kg

-

905x354x660mm

62db (a)

DN40ISO-KF

DN63ISO-K

0 --70L/min

1.5kW

1.5kW

1.7kw

3000min⁻¹

3000min⁻¹

COBRA SEMICON-Part Number-COBRA BC 0601 G 60Hz

COBRA BC 0601 G 60Hz

Available upon quote

0.003HPa (MBAR)

Minimum 3.0 --4.0L/min

1.7kw

-

640m³/h

315kg

-

905x354x660mm

62db (a)

DN40ISO-KF

DN63ISO-K

0 --70L/min

1.5kW

1.8kw

1.7kw

3000min⁻¹

3600min⁻¹

COBRA SEMICON-Part Number-COBRA BC 1001 G 50Hz

COBRA BC 1001 G 50Hz

Available upon quote

0.003HPa (MBAR)

Minimum 3.0 --4.0L/min

1.7kw

-

870m³/h

310kg

-

1054x425x615mm

62db (a)

DN40ISO-KF

DN100iso-K

0 --70L/min

1.5kW

2.9kw

1.7kw

3000min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA BC 1001 G 60Hz

COBRA BC 1001 G 60Hz

Available upon quote

0.003HPa (MBAR)

Minimum 3.0 --4.0L/min

1.2kw

-

870m³/h

310kg

-

1054x425x615mm

62db (a)

DN40ISO-KF

DN100iso-K

0 --70L/min

1.5kW

2.9kw

1.2kw

3000min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA BC 1200 A 50Hz

COBRA BC 1200 A 50Hz

Available upon quote

0.003HPa (MBAR)

Minimum 4.0 --5.0L/min

1.9kw

-

1200m³/h

360kg

-

1054x425x615mm

62db (a)

DN40ISO-KF

DN160ISO-K

0 --70L/min

1.5kW

4.0kW

1.9kw

3000min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA BC 1200 A 60Hz

COBRA BC 1200 A 60Hz

Available upon quote

0.003HPa (MBAR)

Minimum 4.0 --5.0L/min

1.3kw

-

1200m³/h

360kg

-

1054x425x615mm

62db (a)

DN40ISO-KF

DN160ISO-K

0 --70L/min

1.5kW

4.0kW

1.3kw

3000min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 0080 G 50Hz

COBRA DS 0080 G 50Hz

Available upon quote

0.03HPa (MBAR)

4.0L/min

2.6kw

4.0kW

70m³/h

276kg

3000min⁻¹

865x385x667mm

<62db (a)

DN40

DN40

0 --75L/min

- - - - -
COBRA SEMICON-Part Number-COBRA DS 0080 G 60Hz

COBRA DS 0080 G 60Hz

Available upon quote

0.03HPa (MBAR)

4.0L/min

3.2kw

4.4kw

85m³/h

276kg

3600min⁻¹

865x385x667mm

<62db (a)

DN40

DN40

0 --75L/min

- - - - -
COBRA SEMICON-Part Number-COBRA DS 0160 G 50Hz

COBRA DS 0160 G 50Hz

Available upon quote

0.03HPa (MBAR)

4.0L/min

4.3kw

5.5kW

140m³/h

338kg

3000min⁻¹

975x425x697mm

<68db (a)

DN40

DN50

0 --75L/min

- - - - -
COBRA SEMICON-Part Number-COBRA DS 0160 G 60Hz

COBRA DS 0160 G 60Hz

Available upon quote

0.03HPa (MBAR)

4.0L/min

5.2kw

6.6kw

160m³/h

338kg

3600min⁻¹

975x425x697mm

<68db (a)

DN40

DN50

0 --75L/min

- - - - -
COBRA SEMICON-Part Number-COBRA DS 0600 E 50Hz

COBRA DS 0600 E 50Hz

Available upon quote

0.01HPa (MBAR)

6L/min

9kw

15kW

600m³/h

745kg

3600min⁻¹

1654x600x747mm

<70db (a)

DN63

DN100

0-200L/Min

- - - - -
COBRA SEMICON-Part Number-COBRA DS 0600 E 60Hz

COBRA DS 0600 E 60Hz

Available upon quote

0.01HPa (MBAR)

6L/min

9kw

15kW

600m³/h

745kg

3600min⁻¹

1654x600x747mm

<70db (a)

DN63

DN100

0-200L/Min

- - - - -
COBRA SEMICON-Part Number-COBRA DS 0700 G 50Hz

COBRA DS 0700 G 50Hz

Available upon quote

0.003HPa (MBAR)

5.0L/min

3.0kW

-

500m³/h

445kg

-

865x385x917mm

<62db (a)

DN40

DN63

0 --75L/min

4.0kW

4.0kW

3.0kW

3000min⁻¹

3000min⁻¹

COBRA SEMICON-Part Number-COBRA DS 0700 G 60Hz

COBRA DS 0700 G 60Hz

Available upon quote

0.003HPa (MBAR)

5.0L/min

3.6kw

-

610m³/h

445kg

-

865x385x917mm

<62db (a)

DN40

DN63

0 --75L/min

4.4kw

4.4kw

3.6kw

3600min⁻¹

3600min⁻¹

COBRA SEMICON-Part Number-COBRA DS 1000 G 50Hz

COBRA DS 1000 G 50Hz

Available upon quote

0.003HPa (MBAR)

5.0L/min

3.3kw

-

775m³/h

576kg

-

1034x425x1017mm

<62db (a)

DN40

DN100

0 --75L/min

4.0kW

4.0kW

3.3kw

3000min⁻¹

3000min⁻¹

COBRA SEMICON-Part Number-COBRA DS 1000 G 60Hz

COBRA DS 1000 G 60Hz

Available upon quote

0.003HPa (MBAR)

5.0L/min

4.0kW

-

960m³/h

576kg

-

1034x425x1017mm

<62db (a)

DN40

DN100

0 --75L/min

4.4kw

4.4kw

4.0kW

3600min⁻¹

3600min⁻¹

COBRA SEMICON-Part Number-COBRA DS 2000 G 50Hz

COBRA DS 2000 G 50Hz

Available upon quote

0.003HPa (MBAR)

5.0L/min

5.6kw

-

1365m³/h

668kg

-

1063x465x1069mm

<68db (a)

DN40

DN160

0 --75L/min

5.5kW

5.5kW

5.6kw

3000min⁻¹

3000min⁻¹

COBRA SEMICON-Part Number-COBRA DS 2000 G 60Hz

COBRA DS 2000 G 60Hz

Available upon quote

0.003HPa (MBAR)

5.0L/min

6.8kw

-

1640m³/h

668kg

-

1063x465x1069mm

<68db (a)

DN40

DN160

0 --75L/min

6.6kw

6.6kw

6.8kw

3600min⁻¹

3600min⁻¹

COBRA SEMICON-Part Number-COBRA DS 1200 A 50Hz

COBRA DS 1200 A 50Hz

Available upon quote

0.003HPa (MBAR)

7.0 --8.0l/min

- -

1200m³/h

500kg

-

1073x426x740mm

<62db (a)

DN40ISO-KF

DN160ISO-K

0 --75L/min

4.0kW

4.0kW

-

3000min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 1200 A 60Hz

COBRA DS 1200 A 60Hz

Available upon quote

0.003HPa (MBAR)

7.0 --8.0l/min

- -

1200m³/h

500kg

-

1073x426x740mm

<62db (a)

DN40ISO-KF

DN160ISO-K

0 --75L/min

4.4kw

4.0kW

-

3600min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 1800 A 50Hz

COBRA DS 1800 A 50Hz

Available upon quote

0.003HPa (MBAR)

7.0 --8.0l/min

- -

1700m³/h

500kg

-

1073x426x750mm

<62db (a)

DN40ISO-KF

DN160ISO-K

0 --75L/min

4.4kw

4.0kW

-

5100min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 1800 A 60Hz

COBRA DS 1800 A 60Hz

Available upon quote

0.003HPa (MBAR)

7.0 --8.0l/min

- -

1700m³/h

500kg

-

1073x426x750mm

<62db (a)

DN40ISO-KF

DN160ISO-K

0 --75L/min

4.4kw

4.0kW

-

5100min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 1800 A H 50Hz

COBRA DS 1800 A H 50Hz

Available upon quote

0.003HPa (MBAR)

Minimum 7.0 --8.0L/min

- -

1700m³/h

520kg

-

1124x426x750mm

<62db (a)

DN40ISO-KF

DN160ISO-K

0 --75L/min

6.6kw

4.0kW

-

3600min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 1800 A H 60Hz

COBRA DS 1800 A H 60Hz

Available upon quote

0.003HPa (MBAR)

Minimum 7.0 --8.0L/min

- -

1700m³/h

520kg

-

1124x426x750mm

<62db (a)

DN40ISO-KF

DN160ISO-K

0 --75L/min

6.6kw

4.0kW

-

3600min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 2141 A 50Hz

COBRA DS 2141 A 50Hz

Available upon quote

0.003HPa (MBAR)

Minimum 7.0 --8.0L/min

5.0kW

-

1875m³/h

600kg

-

1133x425x954mm

<75db (a)

DN50

DN160

0 --75L/min

7.9kw

4.0kW

-

4320min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 2141 A 60Hz

COBRA DS 2141 A 60Hz

Available upon quote

0.003HPa (MBAR)

Minimum 7.0 --8.0L/min

5.0kW

-

1875m³/h

600kg

-

1133x425x954mm

<75db (a)

DN50

DN160

0 --75L/min

7.9kw

4.0kW

-

4320min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 2610 E 50Hz

COBRA DS 2610 E 50Hz

Available upon quote

0.001HPa (MBAR)

10L/min

10kW

-

1830m³/h

1300kg

-

1420x722x1452mm

<75db (a)

DN63

DN160

0-200L/Min

15kW

5.5kW

10kW

3000min⁻¹

3000min⁻¹

COBRA SEMICON-Part Number-COBRA DS 2610 E 60Hz

COBRA DS 2610 E 60Hz

Available upon quote

0.001HPa (MBAR)

10L/min

11kw

-

2130m³/h

1300kg

-

1420x722x1452mm

<75db (a)

DN63

DN160

0-200L/Min

15kW

6.6kw

11kw

3600min⁻¹

3600min⁻¹

COBRA SEMICON-Part Number-COBRA DS 3010 F 50Hz

COBRA DS 3010 F 50Hz

Available upon quote

0.001HPa (MBAR)

10L/min

11.8kw

-

3200m³/h

1380kg

-

1420x722x1452mm

<75db (a)

DN63

DN160

0-200L/Min

15kW

15kW

11.8kw

3600min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 3010 F 60Hz

COBRA DS 3010 F 60Hz

Available upon quote

0.001HPa (MBAR)

10L/min

9.9kw

-

3200m³/h

1380kg

-

1420x722x1452mm

<75db (a)

DN63

DN160

0-200L/Min

15kW

15kW

9.9kw

3600min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 3161 B 50Hz

COBRA DS 3161 B 50Hz

Available upon quote

0.001HPa (MBAR)

10L/min

11.8kw

-

3200m³/h

1360kg

-

1316x633x1249mm

<75db (a)

DN63

DN160

0-200L/Min

15kW

15kW

11.8kw

3600min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 3161 B 60Hz

COBRA DS 3161 B 60Hz

Available upon quote

0.001HPa (MBAR)

10L/min

9.9kw

-

3200m³/h

1360kg

-

1316x633x1249mm

<75db (a)

DN63

DN160

0-200L/Min

15kW

15kW

9.9kw

3600min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 3181 B 50Hz

COBRA DS 3181 B 50Hz

Available upon quote

0.001HPa (MBAR)

Minimum 10L/min

12.4kw

-

3500m³/h

1390kg

-

1654x722x1452mm

<75db (a)

DN63

DN160

0-200L/Min

18.5kW

15.0kW

10.3kw

4320min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 3181 B 60Hz

COBRA DS 3181 B 60Hz

Available upon quote

0.001HPa (MBAR)

Minimum 10L/min

12.4kw

-

3500m³/h

1390kg

-

1654x722x1452mm

<75db (a)

DN63

DN160

0-200L/Min

18.5kW

15.0kW

10.3kw

4320min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 5161 A 50Hz

COBRA DS 5161 A 50Hz

Available upon quote

0.001HPa (MBAR)

12L/min

12.5kw

-

4200m³/h

1440kg

-

1550x723x1452mm

<75db (a)

DN63

DN200

0-200L/Min

15kW

15kW

12.5kw

3600min⁻¹

3600min⁻¹

COBRA SEMICON-Part Number-COBRA DS 5161 A 60Hz

COBRA DS 5161 A 60Hz

Available upon quote

0.001HPa (MBAR)

12L/min

10kW

-

4200m³/h

1440kg

-

1550x723x1452mm

<75db (a)

DN63

DN200

0-200L/Min

15kW

15kW

10kW

3600min⁻¹

3600min⁻¹

COBRA SEMICON-Part Number-COBRA DS 8161 F 50Hz

COBRA DS 8161 F 50Hz

Available upon quote

0.001HPa (MBAR)

13L/min

13kW

-

6000m³/h

1350kg

-

1441x627x1100mm

<75db (a)

DN63

DN200

0-200L/Min

15kW

20kW

13kW

3600min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 8161 F 60Hz

COBRA DS 8161 F 60Hz

Available upon quote

0.001HPa (MBAR)

13L/min

11kw

-

6000m³/h

1350kg

-

1441x627x1100mm

<75db (a)

DN63

DN200

0-200L/Min

15kW

20kW

11kw

3600min⁻¹

5400min⁻¹

COBRA SEMICON-Part Number-COBRA DS 9161 B 50Hz

COBRA DS 9161 B 50Hz

Available upon quote

0.001HPa (MBAR)

13L/min

13kW

-

6160m³/h

1800kg

-

1567x810x1615mm

<75db (a)

DN63

DN200

0-200L/Min

15kW

20kW

13kW

3600min⁻¹

3600min⁻¹

COBRA SEMICON-Part Number-COBRA DS 9161 B 60Hz

COBRA DS 9161 B 60Hz

Available upon quote

0.001HPa (MBAR)

13L/min

11kw

-

6160m³/h

1800kg

-

1567x810x1615mm

<75db (a)

DN63

DN200

0-200L/Min

15kW

20kW

11kw

3600min⁻¹

3600min⁻¹

COBRA SEMICON-Part Number-COBRA DS 8162 f 50Hz

COBRA DS 8162 f 50Hz

Available upon quote

0.001HPa (MBAR)

22L/min

21kW

-

7000m³/h

2500kg

-

1604x1470x1860mm

<78db (a)

2 · DN63

DN200

2 · (0–200) L/Min

2 ・ 15kW

20kW

19kW

3600min⁻¹

3600min⁻¹

COBRA SEMICON-Part Number-COBRA DS 8162 F 60Hz

COBRA DS 8162 F 60Hz

Available upon quote

0.001HPa (MBAR)

22L/min

21kW

-

7000m³/h

2500kg

-

1604x1470x1860mm

<78db (a)

2 · DN63

DN200

2 · (0–200) L/Min

2 ・ 15kW

20kW

19kW

3600min⁻¹

3600min⁻¹

COBRA SEMICON-Part Number-COBRA DS 8163 B 50Hz

COBRA DS 8163 B 50Hz

Available upon quote

0.001HPa (MBAR)

31L/min

30kW

-

7385m³/h

3320kg

-

1604x2114x1860mm

<78db (a)

3 ・ DN63

DN200

3 · (0 --200) L/Min

3 ・ 15kW

20kW

28kW

3600min⁻¹

3600min⁻¹

COBRA SEMICON-Part Number-COBRA DS 8163 B 60Hz

COBRA DS 8163 B 60Hz

Available upon quote

0.001HPa (MBAR)

31L/min

30kW

-

7385m³/h

3320kg

-

1604x2114x1860mm

<78db (a)

3 ・ DN63

DN200

3 · (0 --200) L/Min

3 ・ 15kW

20kW

28kW

3600min⁻¹

3600min⁻¹

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About Company Handling This Product

Response Rate

100.0%


Response Time

55.3hrs

Company Overview

Busch Vacuum Solutions was founded in 1963 in Virginia Beach, Virginia, US, as a manufacturer of vacuum pumps ...

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