COBRA SEMICON
BUSCH VACUUM SOLUTIONS
About This Product
Dryscrew vacuum pump
COBRA SEMICON Dry Sesugu Crystal vacuum pump is an ideal option for a very difficult process, such as solar modules, flat panels, semiconductors, and various industrial coating applications. The operation principle of COBRA SEMICON is based on the state -of -the -art screw technology. Patent acquired self -balancing screws have set new standards in efficiency. COBRA SEMICON has a high exhaust ability with excellent beeps and powder, so there is no problem in sucking gas containing powder.
Dry and non -contact -type operation principles have realized low maintenance, low -operating costs, and longevity. COBRA Semicon is compact and can be easily installed in a limited space.
Operating principle
Inside the COBRA SEMICON Dry Sesuku Cryste vacuum pump, two screw -type rotors rotate in the opposite direction. The sucked gas is captured between the cylinder and the screw chamber and is carried to the exhaust port while being compressed. During this process, screw rotors do not come into contact with each other or contact cylinders.
Benefits of COBRA BC series
COBRA BC vacuum pump is ideal for use for road rock and transfercanbar. Other uses include metrology, lithography, PVD, rapid thermal process, and silicon etching. Patent acquired self -balancing screw design realizes low vibration and quiet operation. The screw of the COBRA BC vacuum pump has no seams because it is an integrated casting. Therefore, process fluids and particles do not enter the gap. This prevents corrosion and sediment.
The twin rotor of the COBRA BC vacuum pump inequality screw is fixed only on the motor side because of the bell -shaped cantilever structure. Because of its own "flying bearing" design, there is no need for bearing on the intake entrance side. Therefore, the sucking gas does not contact the bearing. This secures a clean vacuum generation and can completely recover the sucked gas. Since the vacuum pump of the COBRA BC series adopts an efficient direct water -cooled system, the temperature of the entire vacuum pump is uniformly maintained, and the thermal stability is maintained throughout the process.
You can control all functions with a completely open communication protocol (Modbus TCP-IP). This includes idling mode and variable speed drive. This communication protocol makes it easy to adapt to specific networks using a general interface.
The COBRA BC series is very compact because of the directly connected candy motor. Because the design is not selected, it can be easily and promptly retrofitted to existing systems.
Ideal solution for semiconductor lights to medium processes
･ Advanced screw design
･ Dry and non -contact type operation principle
･ Unique flying bearing design
･ Conte river structure
･ Compact design that does not select the installation location
･ Direct water -cooled system
･ Completely open communication protocol
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Product
COBRA SEMICON
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Handling Company
BUSCH VACUUM SOLUTIONS
46 Models of COBRA SEMICON
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Achievement vacuum | Amount of water used | Design exhaust speed | External dimensions (LXWXH) | Gas -inlet | Gas outlet | Nitrogen consumption | Noise value (ISO2151) | Power consumption (at the time of reach of reach) | Power consumption (in idol mode) | Rated motor output | Rated motor output (back pump) | Rated motor output (mechanical booster) | Rated motor rotation (back pump) | Rated motor rotation (mechanical booster) | Rated motor rotation speed | mass |
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COBRA BC 0101 G 50Hz |
Available upon quote | 0.01HPa (MBAR) | 1.0L/min | 100m³/h | 520x300x340mm | DN50KF | DN40KF | - | 58db (a) | 1.1kw | - | 1.8kw | - | - | - | - | 3600min⁻¹ | 115kg |
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COBRA BC 0101 G 60Hz |
Available upon quote | 0.01HPa (MBAR) | 1.0L/min | 100m³/h | 520x300x340mm | DN50KF | DN40KF | - | 58db (a) | 1.1kw | - | 1.8kw | - | - | - | - | 3600min⁻¹ | 115kg |
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COBRA BC 0601 G 50Hz |
Available upon quote | 0.003HPa (MBAR) | Minimum 3.0 --4.0L/min | 550m³/h | 905x354x660mm | DN63ISO-K | DN40ISO-KF | 0 --70L/min | 62db (a) | 1.7kw | 1.7kw | - | 1.5kW | 1.5kW | 3000min⁻¹ | 3000min⁻¹ | - | 315kg |
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COBRA BC 0601 G 60Hz |
Available upon quote | 0.003HPa (MBAR) | Minimum 3.0 --4.0L/min | 640m³/h | 905x354x660mm | DN63ISO-K | DN40ISO-KF | 0 --70L/min | 62db (a) | 1.7kw | 1.7kw | - | 1.5kW | 1.8kw | 3000min⁻¹ | 3600min⁻¹ | - | 315kg |
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COBRA BC 1001 G 50Hz |
Available upon quote | 0.003HPa (MBAR) | Minimum 3.0 --4.0L/min | 870m³/h | 1054x425x615mm | DN100iso-K | DN40ISO-KF | 0 --70L/min | 62db (a) | 1.7kw | 1.7kw | - | 1.5kW | 2.9kw | 3000min⁻¹ | 5400min⁻¹ | - | 310kg |
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COBRA BC 1001 G 60Hz |
Available upon quote | 0.003HPa (MBAR) | Minimum 3.0 --4.0L/min | 870m³/h | 1054x425x615mm | DN100iso-K | DN40ISO-KF | 0 --70L/min | 62db (a) | 1.2kw | 1.2kw | - | 1.5kW | 2.9kw | 3000min⁻¹ | 5400min⁻¹ | - | 310kg |
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COBRA BC 1200 A 50Hz |
Available upon quote | 0.003HPa (MBAR) | Minimum 4.0 --5.0L/min | 1200m³/h | 1054x425x615mm | DN160ISO-K | DN40ISO-KF | 0 --70L/min | 62db (a) | 1.9kw | 1.9kw | - | 1.5kW | 4.0kW | 3000min⁻¹ | 5400min⁻¹ | - | 360kg |
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COBRA BC 1200 A 60Hz |
Available upon quote | 0.003HPa (MBAR) | Minimum 4.0 --5.0L/min | 1200m³/h | 1054x425x615mm | DN160ISO-K | DN40ISO-KF | 0 --70L/min | 62db (a) | 1.3kw | 1.3kw | - | 1.5kW | 4.0kW | 3000min⁻¹ | 5400min⁻¹ | - | 360kg |
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COBRA DS 0080 G 50Hz |
Available upon quote | 0.03HPa (MBAR) | 4.0L/min | 70m³/h | 865x385x667mm | DN40 | DN40 | 0 --75L/min | <62db (a) | 2.6kw | - | 4.0kW | - | - | - | - | 3000min⁻¹ | 276kg |
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COBRA DS 0080 G 60Hz |
Available upon quote | 0.03HPa (MBAR) | 4.0L/min | 85m³/h | 865x385x667mm | DN40 | DN40 | 0 --75L/min | <62db (a) | 3.2kw | - | 4.4kw | - | - | - | - | 3600min⁻¹ | 276kg |
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COBRA DS 0160 G 50Hz |
Available upon quote | 0.03HPa (MBAR) | 4.0L/min | 140m³/h | 975x425x697mm | DN50 | DN40 | 0 --75L/min | <68db (a) | 4.3kw | - | 5.5kW | - | - | - | - | 3000min⁻¹ | 338kg |
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COBRA DS 0160 G 60Hz |
Available upon quote | 0.03HPa (MBAR) | 4.0L/min | 160m³/h | 975x425x697mm | DN50 | DN40 | 0 --75L/min | <68db (a) | 5.2kw | - | 6.6kw | - | - | - | - | 3600min⁻¹ | 338kg |
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COBRA DS 0600 E 50Hz |
Available upon quote | 0.01HPa (MBAR) | 6L/min | 600m³/h | 1654x600x747mm | DN100 | DN63 | 0-200L/Min | <70db (a) | 9kw | - | 15kW | - | - | - | - | 3600min⁻¹ | 745kg |
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COBRA DS 0600 E 60Hz |
Available upon quote | 0.01HPa (MBAR) | 6L/min | 600m³/h | 1654x600x747mm | DN100 | DN63 | 0-200L/Min | <70db (a) | 9kw | - | 15kW | - | - | - | - | 3600min⁻¹ | 745kg |
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COBRA DS 0700 G 50Hz |
Available upon quote | 0.003HPa (MBAR) | 5.0L/min | 500m³/h | 865x385x917mm | DN63 | DN40 | 0 --75L/min | <62db (a) | 3.0kW | 3.0kW | - | 4.0kW | 4.0kW | 3000min⁻¹ | 3000min⁻¹ | - | 445kg |
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COBRA DS 0700 G 60Hz |
Available upon quote | 0.003HPa (MBAR) | 5.0L/min | 610m³/h | 865x385x917mm | DN63 | DN40 | 0 --75L/min | <62db (a) | 3.6kw | 3.6kw | - | 4.4kw | 4.4kw | 3600min⁻¹ | 3600min⁻¹ | - | 445kg |
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COBRA DS 1000 G 50Hz |
Available upon quote | 0.003HPa (MBAR) | 5.0L/min | 775m³/h | 1034x425x1017mm | DN100 | DN40 | 0 --75L/min | <62db (a) | 3.3kw | 3.3kw | - | 4.0kW | 4.0kW | 3000min⁻¹ | 3000min⁻¹ | - | 576kg |
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COBRA DS 1000 G 60Hz |
Available upon quote | 0.003HPa (MBAR) | 5.0L/min | 960m³/h | 1034x425x1017mm | DN100 | DN40 | 0 --75L/min | <62db (a) | 4.0kW | 4.0kW | - | 4.4kw | 4.4kw | 3600min⁻¹ | 3600min⁻¹ | - | 576kg |
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COBRA DS 2000 G 50Hz |
Available upon quote | 0.003HPa (MBAR) | 5.0L/min | 1365m³/h | 1063x465x1069mm | DN160 | DN40 | 0 --75L/min | <68db (a) | 5.6kw | 5.6kw | - | 5.5kW | 5.5kW | 3000min⁻¹ | 3000min⁻¹ | - | 668kg |
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COBRA DS 2000 G 60Hz |
Available upon quote | 0.003HPa (MBAR) | 5.0L/min | 1640m³/h | 1063x465x1069mm | DN160 | DN40 | 0 --75L/min | <68db (a) | 6.8kw | 6.8kw | - | 6.6kw | 6.6kw | 3600min⁻¹ | 3600min⁻¹ | - | 668kg |
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COBRA DS 1200 A 50Hz |
Available upon quote | 0.003HPa (MBAR) | 7.0 --8.0l/min | 1200m³/h | 1073x426x740mm | DN160ISO-K | DN40ISO-KF | 0 --75L/min | <62db (a) | - | - | - | 4.0kW | 4.0kW | 3000min⁻¹ | 5400min⁻¹ | - | 500kg |
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COBRA DS 1200 A 60Hz |
Available upon quote | 0.003HPa (MBAR) | 7.0 --8.0l/min | 1200m³/h | 1073x426x740mm | DN160ISO-K | DN40ISO-KF | 0 --75L/min | <62db (a) | - | - | - | 4.4kw | 4.0kW | 3600min⁻¹ | 5400min⁻¹ | - | 500kg |
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COBRA DS 1800 A 50Hz |
Available upon quote | 0.003HPa (MBAR) | 7.0 --8.0l/min | 1700m³/h | 1073x426x750mm | DN160ISO-K | DN40ISO-KF | 0 --75L/min | <62db (a) | - | - | - | 4.4kw | 4.0kW | 5100min⁻¹ | 5400min⁻¹ | - | 500kg |
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COBRA DS 1800 A 60Hz |
Available upon quote | 0.003HPa (MBAR) | 7.0 --8.0l/min | 1700m³/h | 1073x426x750mm | DN160ISO-K | DN40ISO-KF | 0 --75L/min | <62db (a) | - | - | - | 4.4kw | 4.0kW | 5100min⁻¹ | 5400min⁻¹ | - | 500kg |
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COBRA DS 1800 A H 50Hz |
Available upon quote | 0.003HPa (MBAR) | Minimum 7.0 --8.0L/min | 1700m³/h | 1124x426x750mm | DN160ISO-K | DN40ISO-KF | 0 --75L/min | <62db (a) | - | - | - | 6.6kw | 4.0kW | 3600min⁻¹ | 5400min⁻¹ | - | 520kg |
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COBRA DS 1800 A H 60Hz |
Available upon quote | 0.003HPa (MBAR) | Minimum 7.0 --8.0L/min | 1700m³/h | 1124x426x750mm | DN160ISO-K | DN40ISO-KF | 0 --75L/min | <62db (a) | - | - | - | 6.6kw | 4.0kW | 3600min⁻¹ | 5400min⁻¹ | - | 520kg |
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COBRA DS 2141 A 50Hz |
Available upon quote | 0.003HPa (MBAR) | Minimum 7.0 --8.0L/min | 1875m³/h | 1133x425x954mm | DN160 | DN50 | 0 --75L/min | <75db (a) | 5.0kW | - | - | 7.9kw | 4.0kW | 4320min⁻¹ | 5400min⁻¹ | - | 600kg |
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COBRA DS 2141 A 60Hz |
Available upon quote | 0.003HPa (MBAR) | Minimum 7.0 --8.0L/min | 1875m³/h | 1133x425x954mm | DN160 | DN50 | 0 --75L/min | <75db (a) | 5.0kW | - | - | 7.9kw | 4.0kW | 4320min⁻¹ | 5400min⁻¹ | - | 600kg |
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COBRA DS 2610 E 50Hz |
Available upon quote | 0.001HPa (MBAR) | 10L/min | 1830m³/h | 1420x722x1452mm | DN160 | DN63 | 0-200L/Min | <75db (a) | 10kW | 10kW | - | 15kW | 5.5kW | 3000min⁻¹ | 3000min⁻¹ | - | 1300kg |
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COBRA DS 2610 E 60Hz |
Available upon quote | 0.001HPa (MBAR) | 10L/min | 2130m³/h | 1420x722x1452mm | DN160 | DN63 | 0-200L/Min | <75db (a) | 11kw | 11kw | - | 15kW | 6.6kw | 3600min⁻¹ | 3600min⁻¹ | - | 1300kg |
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COBRA DS 3010 F 50Hz |
Available upon quote | 0.001HPa (MBAR) | 10L/min | 3200m³/h | 1420x722x1452mm | DN160 | DN63 | 0-200L/Min | <75db (a) | 11.8kw | 11.8kw | - | 15kW | 15kW | 3600min⁻¹ | 5400min⁻¹ | - | 1380kg |
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COBRA DS 3010 F 60Hz |
Available upon quote | 0.001HPa (MBAR) | 10L/min | 3200m³/h | 1420x722x1452mm | DN160 | DN63 | 0-200L/Min | <75db (a) | 9.9kw | 9.9kw | - | 15kW | 15kW | 3600min⁻¹ | 5400min⁻¹ | - | 1380kg |
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COBRA DS 3161 B 50Hz |
Available upon quote | 0.001HPa (MBAR) | 10L/min | 3200m³/h | 1316x633x1249mm | DN160 | DN63 | 0-200L/Min | <75db (a) | 11.8kw | 11.8kw | - | 15kW | 15kW | 3600min⁻¹ | 5400min⁻¹ | - | 1360kg |
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COBRA DS 3161 B 60Hz |
Available upon quote | 0.001HPa (MBAR) | 10L/min | 3200m³/h | 1316x633x1249mm | DN160 | DN63 | 0-200L/Min | <75db (a) | 9.9kw | 9.9kw | - | 15kW | 15kW | 3600min⁻¹ | 5400min⁻¹ | - | 1360kg |
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COBRA DS 3181 B 50Hz |
Available upon quote | 0.001HPa (MBAR) | Minimum 10L/min | 3500m³/h | 1654x722x1452mm | DN160 | DN63 | 0-200L/Min | <75db (a) | 12.4kw | 10.3kw | - | 18.5kW | 15.0kW | 4320min⁻¹ | 5400min⁻¹ | - | 1390kg |
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COBRA DS 3181 B 60Hz |
Available upon quote | 0.001HPa (MBAR) | Minimum 10L/min | 3500m³/h | 1654x722x1452mm | DN160 | DN63 | 0-200L/Min | <75db (a) | 12.4kw | 10.3kw | - | 18.5kW | 15.0kW | 4320min⁻¹ | 5400min⁻¹ | - | 1390kg |
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COBRA DS 5161 A 50Hz |
Available upon quote | 0.001HPa (MBAR) | 12L/min | 4200m³/h | 1550x723x1452mm | DN200 | DN63 | 0-200L/Min | <75db (a) | 12.5kw | 12.5kw | - | 15kW | 15kW | 3600min⁻¹ | 3600min⁻¹ | - | 1440kg |
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COBRA DS 5161 A 60Hz |
Available upon quote | 0.001HPa (MBAR) | 12L/min | 4200m³/h | 1550x723x1452mm | DN200 | DN63 | 0-200L/Min | <75db (a) | 10kW | 10kW | - | 15kW | 15kW | 3600min⁻¹ | 3600min⁻¹ | - | 1440kg |
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COBRA DS 8161 F 50Hz |
Available upon quote | 0.001HPa (MBAR) | 13L/min | 6000m³/h | 1441x627x1100mm | DN200 | DN63 | 0-200L/Min | <75db (a) | 13kW | 13kW | - | 15kW | 20kW | 3600min⁻¹ | 5400min⁻¹ | - | 1350kg |
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COBRA DS 8161 F 60Hz |
Available upon quote | 0.001HPa (MBAR) | 13L/min | 6000m³/h | 1441x627x1100mm | DN200 | DN63 | 0-200L/Min | <75db (a) | 11kw | 11kw | - | 15kW | 20kW | 3600min⁻¹ | 5400min⁻¹ | - | 1350kg |
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COBRA DS 9161 B 50Hz |
Available upon quote | 0.001HPa (MBAR) | 13L/min | 6160m³/h | 1567x810x1615mm | DN200 | DN63 | 0-200L/Min | <75db (a) | 13kW | 13kW | - | 15kW | 20kW | 3600min⁻¹ | 3600min⁻¹ | - | 1800kg |
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COBRA DS 9161 B 60Hz |
Available upon quote | 0.001HPa (MBAR) | 13L/min | 6160m³/h | 1567x810x1615mm | DN200 | DN63 | 0-200L/Min | <75db (a) | 11kw | 11kw | - | 15kW | 20kW | 3600min⁻¹ | 3600min⁻¹ | - | 1800kg |
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COBRA DS 8162 f 50Hz |
Available upon quote | 0.001HPa (MBAR) | 22L/min | 7000m³/h | 1604x1470x1860mm | DN200 | 2 · DN63 | 2 · (0–200) L/Min | <78db (a) | 21kW | 19kW | - | 2 ・ 15kW | 20kW | 3600min⁻¹ | 3600min⁻¹ | - | 2500kg |
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COBRA DS 8162 F 60Hz |
Available upon quote | 0.001HPa (MBAR) | 22L/min | 7000m³/h | 1604x1470x1860mm | DN200 | 2 · DN63 | 2 · (0–200) L/Min | <78db (a) | 21kW | 19kW | - | 2 ・ 15kW | 20kW | 3600min⁻¹ | 3600min⁻¹ | - | 2500kg |
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COBRA DS 8163 B 50Hz |
Available upon quote | 0.001HPa (MBAR) | 31L/min | 7385m³/h | 1604x2114x1860mm | DN200 | 3 ・ DN63 | 3 · (0 --200) L/Min | <78db (a) | 30kW | 28kW | - | 3 ・ 15kW | 20kW | 3600min⁻¹ | 3600min⁻¹ | - | 3320kg |
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COBRA DS 8163 B 60Hz |
Available upon quote | 0.001HPa (MBAR) | 31L/min | 7385m³/h | 1604x2114x1860mm | DN200 | 3 ・ DN63 | 3 · (0 --200) L/Min | <78db (a) | 30kW | 28kW | - | 3 ・ 15kW | 20kW | 3600min⁻¹ | 3600min⁻¹ | - | 3320kg |
Click on the part number for more information about each product
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About Company Handling This Product
- Since 1963
- 3,800 employees