Product
Pilot Module Mass Flow Controller SMARTTRAK SeriesHandling Company
FCCCategories
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
Product Image | Part Number | Price (excluding tax) | Actuator method | Bearing pressure | Connecting joint | Control flow rate range | Driving power (MFC) | Driving power supply (MFM) | External leak | Flow range range | Flow rate accuracy | Interviewed gas part material | Pressure impact | Reproducibility | Setting/output signal | Sticker material | Temperature impact | Used temperature range | Valve type | responsiveness |
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C100L |
Available upon quote | Solenoid valve (not eligible for meters) | 3.4MPa (g) | 1/4SWL, 1/4VCO, 1/4VCR, 6mmswl, etc. | 2-100 % F.S | 24VDC ± 10 % 500ma | 15-24VDC ± 10 % 30ma | 5 × 10-10PA ・ M3/SECHE | 10SCCM ~ 50SLPM | ± 1.0 % F.S | SUS316L, Biton or Neophane or Calretz or Polyamide selection | ± 0.0015 %/kpaf.s | ± 0.2 % F.S | Standards: 0-5VDC, 1-5VDC, 0 ~ 10VDC, 4-20mA, 0-20mA, RS232 Changes Options: RS485, DeviceNet, ModBusrtu (RS232, RS485), ProfibusDP (RS232), FieldBus (RS232) | Biton or Neopen Select | ± 0.05 %/℃ F.S | 0 to 50 ℃ | NC: Normal Close | 2sec (within ± 2 % of the set value) | |
C100m |
Available upon quote | Solenoid valve (not eligible for meters) | 3.4MPa (g) | 1/4SWL, 1/4VCO, 1/4VCR, 6mmswl, etc. | 2-100 % F.S | 24VDC ± 10 % 800ma | 15-24VDC ± 10 % 230ma | 5 × 10-10PA ・ M3/SECHE | 20-200SLPM | ± 1.0 % F.S | SUS316L, Biton or Neophane or Calretz or Polyamide selection | ± 0.0015 %/kpaf.s | ± 0.2 % F.S | Standards: 0-5VDC, 1-5VDC, 0 ~ 10VDC, 4-20mA, 0-20mA, RS232 Changes Options: RS485, DeviceNet, ModBusrtu (RS232, RS485), ProfibusDP (RS232), FieldBus (RS232) | Biton or Neopen Select | ± 0.05 %/℃ F.S | 0 to 50 ℃ | NC: Normal Close | 2sec (within ± 2 % of the set value) | |
C100m1 |
Available upon quote | Solenoid valve (not eligible for meters) | 3.4MPa (g) | 1/4SWL, 1/4VCO, 1/4VCR, 6mmswl, etc. | 2-100 % F.S | 24VDC ± 10 % 1260ma | 15-24VDC ± 10 % 230ma | 5 × 10-10PA ・ M3/SECHE | 201-300SLPM | ± 2.0 % F.S | SUS316L, Biton or Neophane or Calretz or Polyamide selection | ± 0.0015 %/kpaf.s | ± 0.2 % F.S | Standards: 0-5VDC, 1-5VDC, 0 ~ 10VDC, 4-20mA, 0-20mA, RS232 Changes Options: RS485, DeviceNet, ModBusrtu (RS232, RS485), ProfibusDP (RS232), FieldBus (RS232) | Biton or Neopen Select | ± 0.05 %/℃ F.S | 0 to 50 ℃ | NC: Normal Close | 2sec (within ± 2 % of the set value) | |
C100H |
Available upon quote | Solenoid valve (not eligible for meters) | 3.4MPa (g) | 1/4SWL, 1/4VCO, 1/4VCR, 6mmswl, etc. | 2-100 % F.S | 24VDC ± 10 % 1260ma | 15-24VDC ± 10 % 230ma | 5 × 10-10PA ・ M3/SECHE | 100-500SLPM | ± 1.0 % F.S | SUS316L, Biton or Neophane or Calretz or Polyamide selection | ± 0.0015 %/kpaf.s | ± 0.2 % F.S | Standards: 0-5VDC, 1-5VDC, 0 ~ 10VDC, 4-20mA, 0-20mA, RS232 Changes Options: RS485, DeviceNet, ModBusrtu (RS232, RS485), ProfibusDP (RS232), FieldBus (RS232) | Biton or Neopen Select | ± 0.05 %/℃ F.S | 0 to 50 ℃ | NC: Normal Close | 2sec (within ± 2 % of the set value) | |
C100H1 |
Available upon quote | Solenoid valve (not eligible for meters) | 3.4MPa (g) | 1/4SWL, 1/4VCO, 1/4VCR, 6mmswl, etc. | 2-100 % F.S | 24VDC ± 10 % 1260ma | 15-24VDC ± 10 % 230ma | 5 × 10-10PA ・ M3/SECHE | 501-800SLPM | ± 1.0 % F.S | SUS316L, Biton or Neophane or Calretz or Polyamide selection | ± 0.0015 %/kpaf.s | ± 0.2 % F.S | Standards: 0-5VDC, 1-5VDC, 0 ~ 10VDC, 4-20mA, 0-20mA, RS232 Changes Options: RS485, DeviceNet, ModBusrtu (RS232, RS485), ProfibusDP (RS232), FieldBus (RS232) | Biton or Neopen Select | ± 0.05 %/℃ F.S | 0 to 50 ℃ | NC: Normal Close | 2sec (within ± 2 % of the set value) | |
C100H2 |
Available upon quote | Solenoid valve (not eligible for meters) | 3.4MPa (g) | 1/4SWL, 1/4VCO, 1/4VCR, 6mmswl, etc. | 2-100 % F.S | 24VDC ± 10 % 1260ma | 15-24VDC ± 10 % 230ma | 5 × 10-10PA ・ M3/SECHE | 801-1000SLPM | ± 1.0 % F.S | SUS316L, Biton or Neophane or Calretz or Polyamide selection | ± 0.0015 %/kpaf.s | ± 0.2 % F.S | Standards: 0-5VDC, 1-5VDC, 0 ~ 10VDC, 4-20mA, 0-20mA, RS232 Changes Options: RS485, DeviceNet, ModBusrtu (RS232, RS485), ProfibusDP (RS232), FieldBus (RS232) | Biton or Neopen Select | ± 0.05 %/℃ F.S | 0 to 50 ℃ | NC: Normal Close | 2sec (within ± 2 % of the set value) | |
C100L-HP |
Available upon quote | Solenoid valve (not eligible for meters) | 10.3MPa (g) | 1/4SWL, 1/4VCO, 1/4VCR, 6mmswl, etc. | 2-100 % F.S | 24VDC ± 10 % 800ma | - | 5 × 10-10PA ・ M3/SECHE | 10SCCM ~ 20SLPM | ± 1.0 % F.S | SUS316L, Biton or Neophane or Calretz or Polyamide selection | ± 0.0015 %/kpaf.s | ± 0.2 % F.S | Standards: 0-5VDC, 1-5VDC, 0 ~ 10VDC, 4-20mA, 0-20mA, RS232 Changes Options: RS485, DeviceNet, ModBusrtu (RS232, RS485) ProfibusDP (RS232), FieldBus (RS232) | Biton or Neopen Select | ± 0.05 %/℃ F.S | 0 to 50 ℃ | NC: Normal Close | 2sec (within ± 2 % of the set value) | |
C140 |
Available upon quote | Solenoid valve (not eligible for meters) | 3.4MPa (g) | 1/4SWL, 1/4VCO, 1/4VCR, 6mmswl, etc. | 2-100 % F.S | 24VDC ± 10 % 800ma | - | 5 × 10-10PA ・ M3/SECHE | 10SCCM ~ 200SLPM | ± 1.0 % F.S | SUS316L, Biton or Neophane or Calretz or Polyamide selection | ± 0.0015 %/kpaf.s | ± 0.2 % F.S | Standards: 0-5VDC, 1-5VDC, 0 ~ 10VDC, 4-20mA, 0-20mA, RS232 Changes Options: RS485, DeviceNet, ModBusrtu (RS232, RS485) ProfibusDP (RS232), FieldBus (RS232) | Biton or Neopen Select | ± 0.05 %/℃ F.S | 0 to 50 ℃ | NC: Normal Close | 2sec (within ± 2 % of the set value) | |
C101 |
Available upon quote | Solenoid valve (not eligible for meters) | 3.4MPa (g) | 1/4SWL, 1/4VCO, 1/4VCR, 6mmswl, etc. | 2-100 % F.S | 24VDC ± 10 % 400ma | 15-24VDC ± 10 % 130ma | 5 × 10-10PA ・ M3/SECHE | 4SCCM | ± 1.0 % F.S | SUS316L, Biton or Neophane or Calretz or Polyamide selection | ± 0.0015 %/kpaf.s | ± 0.2 % F.S | Standards: 0-5VDC, 1-5VDC, 0 ~ 10VDC, 4-20mA, 0-20mA, RS232 Changes Options: RS485, DeviceNet, ModBusrtu (RS232, RS485) ProfibusDP (RS232), FieldBus (RS232) | Biton or Neopen Select | ± 0.05 %/℃ F.S | 0 to 50 ℃ | NC: Normal Close | 2sec (within ± 2 % of the set value) | |
C50L |
Available upon quote | Solenoid valve (not eligible for meters) | 1MPa (g) | 1/4SWL, 1/4VCO, 1/4VCR, 6mmswl, etc. | 2-100 % F.S | 24VDC ± 10 % 315mars485: 130ma | 15-24VDC ± 10 % 85ma | 5 × 10-10PA ・ M3/SECHE | 20SCCM ~ 50SLPM | ± 1.0 % F.S | SUS316LOR Aluminum Selection, Bitton | ± 0.0015 %/kpaf.s | ± 0.25 % F.S | RS232OR0 ~ 5VDC+RS232OR4 ~ 20ma+RS232orRs485 Select | Byton | ± 0.05 %/℃ F.S | 0 to 50 ℃ | NC: Normal Close | 2sec (within ± 2 % of the set value) | |
C50m |
Available upon quote | Solenoid valve (not eligible for meters) | 1MPa (g) | 1/4SWL, 1/4VCO, 1/4VCR, 6mmswl, etc. | 2-100 % F.S | 24VDC ± 10 % 850mars485: 130ma | - | 5 × 10-10PA ・ M3/SECHE | 50-200SLPM | ± 1.0 % F.S | SUS316LOR Aluminum Selection, Bitton | ± 0.0015 %/kpaf.s | ± 0.25 % F.S | RS232OR0 ~ 5VDC+RS232OR4 ~ 20ma+RS232orRs485 Select | Byton | ± 0.05 %/℃ F.S | 0 to 50 ℃ | NC: Normal Close | 2sec (within ± 2 % of the set value) |
Click on the part number for more information about each product