C140 | Pilot Module Mass Flow Controller SMARTTRAK Series
FCC
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Actuator method
Bearing pressure
Connecting joint
Control flow rate range
Driving power (MFC)
Driving power supply (MFM)
External leak
Flow range range
Flow rate accuracy
Interviewed gas part material
Pressure impact
Reproducibility
Setting/output signal
Sticker material
Temperature impact
Used temperature range
Valve type
responsiveness
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Part Number
C140
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Handling Company
FCC
Pilot Module Mass Flow Controller SMARTTRAK Series C140's performance table
Items marked with have different values depending on the model number.
| Product Image | Price (excluding tax) | Actuator method | Bearing pressure | Connecting joint | Control flow rate range | Driving power (MFC) | External leak | Flow range range | Flow rate accuracy | Interviewed gas part material | Pressure impact | Reproducibility | Setting/output signal | Sticker material | Temperature impact | Used temperature range | Valve type | responsiveness |
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Available upon quote | Solenoid valve (not eligible for meters) | 3.4MPa (g) | 1/4SWL, 1/4VCO, 1/4VCR, 6mmswl, etc. | 2-100 % F.S | 24VDC ± 10 % 800ma | 5 × 10-10PA ・ M3/SECHE | 10SCCM ~ 200SLPM | ± 1.0 % F.S | SUS316L, Biton or Neophane or Calretz or Polyamide selection | ± 0.0015 %/kpaf.s | ± 0.2 % F.S | Standards: 0-5VDC, 1-5VDC, 0 ~ 10VDC, 4-20mA, 0-20mA, RS232 Changes Options: RS485, DeviceNet, ModBusrtu (RS232, RS485) ProfibusDP (RS232), FieldBus (RS232) | Biton or Neopen Select | ± 0.05 %/℃ F.S | 0 to 50 ℃ | NC: Normal Close | 2sec (within ± 2 % of the set value) |
There are 11 models for this product.
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