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MGMR mass flow controller-FCST1005 (M) ZF / FCST1005 (M) ZD (DeviceNet)
MGMR mass flow controller-FCC

MGMR mass flow controller
FCC

FCC's Response Status

Response Rate

100.0%

Response Time

6.5hours

Fast Response


About This Product

Equipped with a multi -gas multi -range (MG/MR) function, the gas type and flow rate can be easily changed. Eight types of range, from 10SCCM to 50SLM, can be used in a wide range of fields, from advanced technical industries to general industries, such as semiconductors, flat panel displays, and solar panels.

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    MGMR mass flow controller

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3 Models of MGMR mass flow controller

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Flow rate (N2 conversion flow rate) Valve type Control flow rate range Flow rate accuracy Flow rate setting signal Flowing output signal Reproducibility Response time Necessary differential pressure Maximum operating pressure Bearing pressure Warranty temperature External leak Mounting posture Power supply voltage, current consumption Communication method Interviewed gas part material Sticker material Actuator method surface treatment Connecting joint Digital communication
MGMR mass flow controller-Part Number-FCST1005 (M) ZF / FCST1005 (M) ZD (DeviceNet)

FCST1005 (M) ZF / FCST1005 (M) ZD (DeviceNet)

Available upon quote

Bin1: 30scm, bin2: 100sccmbin3 3 300scm, bin4: 1slmbin5: 3slm

NC: Normal Close NO: Normal Open

2-100 % F.S

100-25 %: ± 1.0 % S.P, 25-2 %: ± 0.25 % F.S (accuracy guarantee range 15-35 ° C)

0.1-5VDC

0-5VDC

± 0.2 % F.S

≦ 1sec

50-300kpa (AR: 100-300kpa)

400kpag (AR: 500kpag)

1MPAG

5-50 ℃

Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE

Not specified (free)

#ERROR!

Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet

SUS316L, magnetic stainless steel, Hastelloy, PTFE

Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber

Solenoid actuator

There is no option with EP processing options and rubber seals

1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL

RS485, standard communication speed 38400bps, maximum connection number 127 units

MGMR mass flow controller-Part Number-FCST1030 (M) ZF / FCST1030 (M) ZD (DeviceNet)

FCST1030 (M) ZF / FCST1030 (M) ZD (DeviceNet)

Available upon quote

Bin6: 10slmbin7: 30slm

NC: Normal Close NO: Normal Open

2-100 % F.S

100-25 %: ± 1.0 % S.P, 25-2 %: ± 0.25 % F.S (accuracy guarantee range 15-35 ° C)

0.1-5VDC

0-5VDC

± 0.2 % F.S

≦ 1sec

NO50-300kpa (3-10SLM) (AR: 250-450kpa) 150-300kpa (11-30 SLM) NC50-300kpa (3 to 10SLM) 100-300kpa (11-30SLM) (AR: 150-400kpa)

400kpag (AR: 500kpag)

1MPAG

5-50 ℃

Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE

Not specified (free)

#ERROR!

Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet

SUS316L, magnetic stainless steel, Hastelloy, PTFE

Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber

Solenoid actuator

There is no option with EP processing options and rubber seals

1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL

RS485, standard communication speed 38400bps, maximum connection number 127 units

MGMR mass flow controller-Part Number-FCST1050 (M) ZF / FCST1050 (M) ZD (DeviceNet)

FCST1050 (M) ZF / FCST1050 (M) ZD (DeviceNet)

Available upon quote

Bin8: 50slm

NC: Normal Close NO: Normal Open

2-100 % F.S

100-25 %: ± 1.0 % S.P, 25-2 %: ± 0.25 % F.S (accuracy guarantee range 15-35 ° C)

0.1-5VDC

0-5VDC

± 0.2 % F.S

≦ 1sec

200-300kpa (AR: 250-450kpa)

400kpag (AR: 500kpag)

1MPAG

5-50 ℃

Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE

Not specified (free)

#ERROR!

Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet

SUS316L, magnetic stainless steel, Hastelloy, PTFE

Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber

Solenoid actuator

There is no option with EP processing options and rubber seals

1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL

RS485, standard communication speed 38400bps, maximum connection number 127 units

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

6.5hrs

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