MGMR mass flow controller
FCC
About This Product
Equipped with a multi -gas multi -range (MG/MR) function, the gas type and flow rate can be easily changed.
Eight types of range, from 10SCCM to 50SLM, can be used in a wide range of fields, from advanced technical industries to general industries, such as semiconductors, flat panel displays, and solar panels.
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Product
MGMR mass flow controller
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Handling Company
FCC
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Categories
3 Models of MGMR mass flow controller
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Actuator method | Bearing pressure | Communication method | Connecting joint | Control flow rate range | Digital communication | External leak | Flow rate (N2 conversion flow rate) | Flow rate accuracy | Flow rate setting signal | Flowing output signal | Interviewed gas part material | Maximum operating pressure | Mounting posture | Necessary differential pressure | Power supply voltage, current consumption | Reproducibility | Response time | Sticker material | Valve type | Warranty temperature | surface treatment |
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FCST1005 (M) ZF / FCST1005 (M) ZD (DeviceNet) |
Available upon quote | Solenoid actuator | 1MPAG | Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet | 1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL | 2-100 % F.S | RS485, standard communication speed 38400bps, maximum connection number 127 units | Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE | Bin1: 30scm, bin2: 100sccmbin3 3 300scm, bin4: 1slmbin5: 3slm | 100-25 %: ± 1.0 % S.P, 25-2 %: ± 0.25 % F.S (accuracy guarantee range 15-35 ° C) | 0.1-5VDC | 0-5VDC | SUS316L, magnetic stainless steel, Hastelloy, PTFE | 400kpag (AR: 500kpag) | Not specified (free) | 50-300kpa (AR: 100-300kpa) | #ERROR! | ± 0.2 % F.S | ≦ 1sec | Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber | NC: Normal Close NO: Normal Open | 5-50 ℃ | There is no option with EP processing options and rubber seals |
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FCST1030 (M) ZF / FCST1030 (M) ZD (DeviceNet) |
Available upon quote | Solenoid actuator | 1MPAG | Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet | 1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL | 2-100 % F.S | RS485, standard communication speed 38400bps, maximum connection number 127 units | Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE | Bin6: 10slmbin7: 30slm | 100-25 %: ± 1.0 % S.P, 25-2 %: ± 0.25 % F.S (accuracy guarantee range 15-35 ° C) | 0.1-5VDC | 0-5VDC | SUS316L, magnetic stainless steel, Hastelloy, PTFE | 400kpag (AR: 500kpag) | Not specified (free) | NO50-300kpa (3-10SLM) (AR: 250-450kpa) 150-300kpa (11-30 SLM) NC50-300kpa (3 to 10SLM) 100-300kpa (11-30SLM) (AR: 150-400kpa) | #ERROR! | ± 0.2 % F.S | ≦ 1sec | Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber | NC: Normal Close NO: Normal Open | 5-50 ℃ | There is no option with EP processing options and rubber seals |
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FCST1050 (M) ZF / FCST1050 (M) ZD (DeviceNet) |
Available upon quote | Solenoid actuator | 1MPAG | Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet | 1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL | 2-100 % F.S | RS485, standard communication speed 38400bps, maximum connection number 127 units | Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE | Bin8: 50slm | 100-25 %: ± 1.0 % S.P, 25-2 %: ± 0.25 % F.S (accuracy guarantee range 15-35 ° C) | 0.1-5VDC | 0-5VDC | SUS316L, magnetic stainless steel, Hastelloy, PTFE | 400kpag (AR: 500kpag) | Not specified (free) | 200-300kpa (AR: 250-450kpa) | #ERROR! | ± 0.2 % F.S | ≦ 1sec | Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber | NC: Normal Close NO: Normal Open | 5-50 ℃ | There is no option with EP processing options and rubber seals |
Click on the part number for more information about each product
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