MGMR mass flow controller-FCC

FCST1005 (M) ZF / FCST1005 (M) ZD (DeviceNet) | MGMR mass flow controller
FCC


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Actuator method

Bearing pressure

Communication method

Connecting joint

Control flow rate range

Digital communication

External leak

Flow rate (N2 conversion flow rate)

Flow rate accuracy

Flow rate setting signal

Flowing output signal

Interviewed gas part material

Maximum operating pressure

Mounting posture

Necessary differential pressure

Power supply voltage, current consumption

Reproducibility

Response time

Sticker material

Valve type

Warranty temperature

surface treatment

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  • Part Number

    FCST1005 (M) ZF / FCST1005 (M) ZD (DeviceNet)




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MGMR mass flow controller FCST1005 (M) ZF / FCST1005 (M) ZD (DeviceNet)'s performance table

Items marked with have different values ​​depending on the model number.

Product Image Price (excluding tax) Actuator method Bearing pressure Communication method Connecting joint Control flow rate range Digital communication External leak Flow rate (N2 conversion flow rate) Flow rate accuracy Flow rate setting signal Flowing output signal Interviewed gas part material Maximum operating pressure Mounting posture Necessary differential pressure Power supply voltage, current consumption Reproducibility Response time Sticker material Valve type Warranty temperature surface treatment
MGMR mass flow controller-Part Number-FCST1005 (M) ZF / FCST1005 (M) ZD (DeviceNet) Available upon quote Solenoid actuator 1MPAG Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet 1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL 2-100 % F.S RS485, standard communication speed 38400bps, maximum connection number 127 units Metal Seal: 1 × 10-11PA · M3/SECHE Rubber Seal: 1 × 10-7PA · M3/SECHE Bin1: 30scm, bin2: 100sccmbin3 3 300scm, bin4: 1slmbin5: 3slm 100-25 %: ± 1.0 % S.P, 25-2 %: ± 0.25 % F.S (accuracy guarantee range 15-35 ° C) 0.1-5VDC 0-5VDC SUS316L, magnetic stainless steel, Hastelloy, PTFE 400kpag (AR: 500kpag) Not specified (free) 50-300kpa (AR: 100-300kpa) #ERROR! ± 0.2 % F.S ≦ 1sec Metal Seal: SUS316L Rubber Seal: Fluoro Rubber or Chloroprene rubber NC: Normal Close NO: Normal Open 5-50 ℃ There is no option with EP processing options and rubber seals

There are 3 models for this product.

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