5slm SFM6000D-5slm-SFM6000D-5slm
5slm SFM6000D-5slm-Sensirion

5slm SFM6000D-5slm
Sensirion


About This Product

The SFM6000 is the valveless sister of the SFC6000 mass flow controller, offering superior performance at an even lower price. The SFC6000 mass flow controller is Sensirion's next generation mass flow controller, and with an unparalleled price/performance ratio and delivery time of 8 weeks, it is an extremely attractive product. Samples of the SFC6000 are available with fast turnaround times while our competitors have delivery times ranging from 30 to 53 weeks. In addition, some SFC6000 products with pre-defined calibrations are available through catalog distribution. The SFC6000 is extremely small and light, allowing you to optimize device size and weight. This is a decisive advantage, especially for portable devices. Additionally, it offers excellent performance in terms of repeatability, precision, control range, and speed. The supply chain is robust because the SFC6000 is highly integrated and uses very few electronic components. Based on the principle of thermal mass measurement and employing proven CMOSens® MEMS technology, Sensirion offers mass flow controllers with best-in-class performance and response speed. It does not drift and does not require service recalibration, unlike most other devices on the market. ■Applications ・Semiconductor: Front opening unified pod (FOUP), glass coating and processing ・Analytical equipment: gas chromatography, bioreactor ・Medical equipment: anesthesia, ventilation, cardiopulmonary bypass, N2O therapy ・Industrial automation

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    5slm SFM6000D-5slm

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1 Models of 5slm SFM6000D-5slm

Product Image Part Number Price (excluding tax) Average supply current Interface Mass flow Full scale flow rate Mass flow Maximum working pressure Mass flow accuracy Mass flow calibration Mass flow fluid connector port Maximum supply current Size (LxWxH) Supply voltage
5slm SFM6000D-5slm-Part Number-SFM6000D-5slm

SFM6000D-5slm

Available upon quote 10mA I2C, RS485 5slm
5,000 sccm
10bar 0.2%FS or 2%SP Air, N₂, O₂, N₂O, Ar and CO₂ flow Push-in 6mm, downmount 20mA 74 x 40 x 20mm3 22.8-25.2V

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