All Categories

History

  1. Metoree
  2. Machining / Machine Tools
  3. Etching Equipment
  4. Platform for DRIE applications PlasmaPro 100 Estrelas DRIE (Oxford Instruments Ltd.)
Platform for DRIE applications PlasmaPro 100 Estrelas DRIE-PlasmaPro 100 Estrelas DRIE
Platform for DRIE applications PlasmaPro 100 Estrelas DRIE-Oxford Instruments Ltd.

Platform for DRIE applications PlasmaPro 100 Estrelas DRIE
Oxford Instruments Ltd.

Oxford Instruments Ltd.'s Response Status

Response Rate

100.0%

Response Time

26.3hours

Relatively Fast Response

About This Product

The PlasmaPro 100 Estrelas platform is designed for total flexibility for deep reactive ion etching (DRIE) applications. We can meet the diverse process requirements of the MEMS (Micro Electro Mechanical Systems), advanced packaging and nanotechnology markets. PlasmaPro 100 Estrelas offers ultimate flexibility with Bosch and cryogenic process compatibility.

■Features

・High selectivity using high-speed etching and Bosch process ・Process that enables smooth side walls ・High anisotropy (vertical direction) profile ・Low rate, low power (SOI) for nanosilicon etch and notch control ・Slanted via etching ・Wide range of application fields ・Mechanical or electrostatic clamp ・Excellent reproducibility ・Extension of mean cleaning interval time (MTBC)

  • Product

    Platform for DRIE applications PlasmaPro 100 Estrelas DRIE

Share this product


260+ people viewing

Last viewed: 5 hours ago

Free
Get started with our free quotation service - no cost, no obligation.

No Phone Required
We respect your privacy. You can receive quotes without sharing your phone number.

1 Models of Platform for DRIE applications PlasmaPro 100 Estrelas DRIE

Image Part Number Price (excluding tax) Minimum etching rate/nm Side wall Profile Photoresist selectivity Cleaning Etching speed (μm/min) Aspect ratio ARDE (aspect ratio dependent etching) control
Platform for DRIE applications PlasmaPro 100 Estrelas DRIE-Part Number-PlasmaPro 100 Estrelas DRIE

PlasmaPro 100 Estrelas DRIE

Available upon quote

Bosch: ≈ 300
Cryogenic: ≈ 10
Mixed gas: 30

Bosch: coarse
Cryogenic: smooth
Mixed gas: smooth

Bosch: Vertical
Cryogenic: Vertical or tilted
Mixed gas: vertical or inclined

Bosch: very expensive
Cryogenic: high
Mixed gas: low

Bosch: Normal
Cryogenic: Almost unnecessary
Mixed gas: normal

Bosch: fast
Cryogenic: Intermediate
Mixed gas: low speed

Bosch: very expensive
Cryogenic: high
Mixed gas: low

Bosch: Compatible
Cryogenic: limited
Mixed gas: limited

Customers who viewed this product also viewed

Reviews shown here are reviews of companies.

Plasma processing device ICP metal etching device-SHINKO SEIKI CO., LTD.

Plasma processing device ICP metal etching device

SHINKO SEIKI CO., LTD.

330+ people viewing

Last viewed: 5 hours ago

Etching Equipment
Plasma processing device multi -chamber ICP etching device-SHINKO SEIKI CO., LTD.

Plasma processing device multi -chamber ICP etching device

SHINKO SEIKI CO., LTD.

370+ people viewing

Last viewed: 7 hours ago

Etching Equipment

4 models listed

Coating/developing device CSX series-TAZMO CO.,LTD.

Coating/developing device CSX series

TAZMO CO.,LTD.

90+ people viewing

Last viewed: 5 hours ago

Etching Equipment

3 models listed

Plasma etching device EXAM-SHINKO SEIKI CO., LTD.

Plasma etching device EXAM

SHINKO SEIKI CO., LTD.

360+ people viewing

Last viewed: 2 minutes ago

Etching Equipment

4 models listed

Coating/developing device SPR series-TAZMO CO.,LTD.

Coating/developing device SPR series

TAZMO CO.,LTD.

110+ people viewing

Last viewed: 5 hours ago

Etching Equipment

3 models listed

Small etching equipment AEP-3000S-Actes Kyosan Co., Ltd.

Small etching equipment AEP-3000S

Actes Kyosan Co., Ltd.

130+ people viewing

Last viewed: 5 hours ago

Response time: 45.13 hours

Etching Equipment

2 models listed

ICP Plasma etching device Serio-SHINKO SEIKI CO., LTD.

ICP Plasma etching device Serio

SHINKO SEIKI CO., LTD.

260+ people viewing

Last viewed: 15 hours ago

Etching Equipment

2 models listed

Wet line equipment Etching peeling line-Phi Corporation Co., Ltd.

Wet line equipment Etching peeling line

Phi Corporation Co., Ltd.

190+ people viewing

Last viewed: 5 hours ago

Etching Equipment

2 models listed

Electrolysis etching unit "CEL-03"-True Sortech

Electrolysis etching unit "CEL-03"

True Sortech

600+ people viewing

Last viewed: 5 hours ago

Response time: 20.20 hours

Etching Equipment

2 models listed

Compact and versatile etch and deposition solution PlasmaPro 80 PECVD-Oxford Instruments Ltd.

Compact and versatile etch and deposition solution PlasmaPro 80 PECVD

Oxford Instruments Ltd.

240+ people viewing

Last viewed: 5 hours ago

Response time: 26.30 hours

Etching Equipment

4 models listed

Achieves smooth surfaces with low damage PlasmaPro 100 ALE Atomic Layer Etching System-Oxford Instruments Ltd.

Achieves smooth surfaces with low damage PlasmaPro 100 ALE Atomic Layer Etching System

Oxford Instruments Ltd.

240+ people viewing

Last viewed: 5 hours ago

Response time: 26.30 hours

Etching Equipment

3 models listed

PlasmaPro 80 RIE provides versatile etch and deposition solutions with an easy-to-use atmospheric charging method-Oxford Instruments Ltd.

PlasmaPro 80 RIE provides versatile etch and deposition solutions with an easy-to-use atmospheric charging method

Oxford Instruments Ltd.

230+ people viewing

Last viewed: 4 minutes ago

Response time: 26.30 hours

Etching Equipment

4 models listed

See More Etching Equipment Products

Other products of Oxford Instruments Ltd.

Reviews shown here are reviews of companies.

1000 Series Glass X-ray Tubes Ideal for Use with Integrated X-ray Sources-Oxford Instruments Ltd.

1000 Series Glass X-ray Tubes Ideal for Use with Integrated X-ray Sources

Oxford Instruments Ltd.

330+ people viewing

Response time: 26.30 hours

X-ray Tubes

3 models listed

1500 series glass X-ray tube ideal for industrial inspection and non-destructive testing applications-Oxford Instruments Ltd.

1500 series glass X-ray tube ideal for industrial inspection and non-destructive testing applications

Oxford Instruments Ltd.

440+ people viewing

Last viewed: 7 hours ago

Response time: 26.30 hours

X-ray Tubes

9 models listed

1501 series glass X-ray tube ideal for industrial inspection and non-destructive testing applications-Oxford Instruments Ltd.

1501 series glass X-ray tube ideal for industrial inspection and non-destructive testing applications

Oxford Instruments Ltd.

280+ people viewing

Response time: 26.30 hours

X-ray Tubes

2 models listed

1550 Series Glass X-ray Tube Ideal for Industrial and Non-Destructive Testing-Oxford Instruments Ltd.

1550 Series Glass X-ray Tube Ideal for Industrial and Non-Destructive Testing

Oxford Instruments Ltd.

350+ people viewing

Response time: 26.30 hours

X-ray Tubes

4 models listed

3000 series 30kV X-ray tube ideal for continuous operation-Oxford Instruments Ltd.

3000 series 30kV X-ray tube ideal for continuous operation

Oxford Instruments Ltd.

460+ people viewing

Last viewed: 3 hours ago

Response time: 26.30 hours

X-ray Tubes

10 models listed

Specifying the sample observation location and positioning the cantilever is possible alpha300A–AFM atomic force microscope-Oxford Instruments Ltd.

Specifying the sample observation location and positioning the cantilever is possible alpha300A–AFM atomic force microscope

Oxford Instruments Ltd.

260+ people viewing

Last viewed: 5 minutes ago

Response time: 26.30 hours

Atomic Force Microscopes
Easy way to start Raman alpha300access – Entry model Raman microscope-Oxford Instruments Ltd.

Easy way to start Raman alpha300access – Entry model Raman microscope

Oxford Instruments Ltd.

190+ people viewing

Last viewed: 8 hours ago

Response time: 26.30 hours

Raman Microscopes
Experience a new level of automation alpha300apyron – Automated Raman Imaging Microscopy-Oxford Instruments Ltd.

Experience a new level of automation alpha300apyron – Automated Raman Imaging Microscopy

Oxford Instruments Ltd.

240+ people viewing

Last viewed: 8 hours ago

Response time: 26.30 hours

Raman Microscopes
Establishing a firm position alpha300R – Raman imaging microscope-Oxford Instruments Ltd.

Establishing a firm position alpha300R – Raman imaging microscope

Oxford Instruments Ltd.

300+ people viewing

Last viewed: 8 hours ago

Response time: 26.30 hours

Raman Microscopes
Observe shape images and Raman images with one device alpha300 RA – AFM Raman combined device-Oxford Instruments Ltd.

Observe shape images and Raman images with one device alpha300 RA – AFM Raman combined device

Oxford Instruments Ltd.

260+ people viewing

Last viewed: 8 hours ago

Response time: 26.30 hours

Raman Microscopes
Balor sCMOS sCMOS camera series ideal for measuring photometry and astronomical fluctuations on time scales from milliseconds to tens of seconds-Oxford Instruments Ltd.

Balor sCMOS sCMOS camera series ideal for measuring photometry and astronomical fluctuations on time scales from milliseconds to tens of seconds

Oxford Instruments Ltd.

230+ people viewing

Response time: 26.30 hours

Complementary Metal Oxide Semiconductor (CMOS) Cameras
Intuitive and easy-to-use nanoelectrical workflow ErgoAFM software-Oxford Instruments Ltd.

Intuitive and easy-to-use nanoelectrical workflow ErgoAFM software

Oxford Instruments Ltd.

160+ people viewing

Last viewed: 4 hours ago

Response time: 26.30 hours


View more products of Oxford Instruments Ltd.

About Company Handling This Product

Oxford Instruments Ltd.

Response Rate

100.0%

Response Time

26.3hrs

  • Japan

Related search keywords

Etching Equipment
Etching Equipment　Oxford Instruments Ltd.
Oxford Instruments Ltd.

This is the version of our website addressed to speakers of English in the United States. If you are a resident of another country, please select the appropriate version of Metoree for your country in the drop-down menu.

Copyright © 2024 Metoree