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Maskless exposure equipment Minimal Maskless exposure equipmentHandling Company
PMT Co., Ltd.Categories
Image | Part Number | Price (excluding tax) | Exposure method | Exposure resolution | Weight | Overlay accuracy | Focusing alignment | Power consumption | Body dimensions | Board transportation | Substrate | Light source | Utility | Data resolution |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Minimal maskless exposure equipment |
Available upon quote |
Scan exposure method |
1.0µm (1:1 L/S) |
Approximately 150kg |
Within ±0.5μm |
Fully automatic |
300W |
W294 × D450 × H1,440mm |
Minimal Shuttle & Conveyance System (PLAD) |
0.5 inch minimal wafer |
LED (light source wavelength: λ=385nm) |
AC100V (5A) Compressed air 0.45~0.8MPa |
Standard exposure: 0.5µm/pix, Fine exposure: 0.05µm/pix (x10), 0.10µm/pix (x5), 0.125µm/pix (x4), 0.25µm/pix (x5) |
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