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  4. Maskless exposure equipment D-light DL-1000 is capable of 256-level grayscale exposure with high-speed time modulation of DMD. (PMT Co., Ltd.)
Maskless exposure equipment D-light DL-1000 is capable of 256-level grayscale exposure with high-speed time modulation of DMD.-D-light DL-1000
Maskless exposure equipment D-light DL-1000 is capable of 256-level grayscale exposure with high-speed time modulation of DMD.-PMT Co., Ltd.

Maskless exposure equipment D-light DL-1000 is capable of 256-level grayscale exposure with high-speed time modulation of DMD.
PMT Co., Ltd.

About This Product

The maskless exposure system D-Light DL-1000 is a device that draws patterns on semiconductor wafers etc. using exposure. High-speed time modulation of a display element called DMD (Digital Micromirror Device) enables 256-level grayscale exposure. Complex three-dimensional structures can also be realized without a photomask.

■Direct drawing with DMD

A DMD is a display element that consists of microscopic mirror surfaces 10-plus µm square arranged in a grid pattern. By illuminating the mirror surface with light from an LED light source and tilting (ON/OFF control) each mirror, pattern image data is drawn directly onto the substrate. Normally, exposure is performed by switching the binary state of ON/OFF, but by performing time modulation of high-speed micromirrors, three-dimensional grayscale exposure with 256 gradations is now possible.

■Equipped with ultra-high-definition exposure mode

Equipped with an ultra-high-definition exposure mode that uses pixel complementation technology as standard. Jaggedness in exposure results can be eliminated in micron order. Although the throughput time is longer, the data reproducibility of diagonal lines and curves is dramatically improved. It can be used depending on the tact and accuracy and purpose.

  • Product

    Maskless exposure equipment D-light DL-1000 is capable of 256-level grayscale exposure with high-speed time modulation of DMD.

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1 Models of Maskless exposure equipment D-light DL-1000 is capable of 256-level grayscale exposure with high-speed time modulation of DMD.

Image Part Number Price (excluding tax) Exposure ability Exposure method Power supply Weight Overlay accuracy Body dimensions Substrate Resolution Light source Usage environment
Maskless exposure equipment D-light DL-1000 is capable of 256-level grayscale exposure with high-speed time modulation of DMD.-Part Number-D-light DL-1000

D-light DL-1000

Available upon quote

400mm2/min (at standard exposure)

Scan exposure method

AC100V (3A)

Approximately 1,300kg

Within ±0.5μm

W2,000 × D1,300 × H2,000mm

Max. □300mm wafer

Standard exposure: 0.5µm/pix, Fine exposure: 0.05µm/pix (x10), 0.10µm/pix (x5), 0.125µm/pix (x4), 0.25µm/pix (x5)

LED (light source wavelength: λ=385nm)

Temperature: 22±1℃, Humidity: 50±10%RH (no condensation)

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PMT Co., Ltd.

  • Japan

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Semiconductor Lithography Equipment　PMT Co., Ltd.
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