Plasma products D-AiPlasma atmospheric pressure plasma equipment
Denshi Giken Co., Ltd.
About This Product
■Summary
The activated gas is generated by flowing argon gas (Ar) and oxygen gas (O₂) into a reaction tube (made of quartz glass) under atmospheric pressure and generating a plasma discharge with 13.56MHz high-frequency power. The surface of the object to be treated is treated with plasma by spraying it onto the irradiated surface of the object.
■Features
・Since plasma is generated inside a quartz glass tube, clean plasma processing is possible without particles and other impurities falling onto the object to be processed.
・There are few consumable parts in the plasma generation part, and with regular maintenance, it has a long life of more than 10,000 hours.
- Plasma processing is possible under atmospheric pressure, reducing the initial cost of equipment investment as there is no need for decompression equipment.
・Separated into two parts: plasma generation part and controller part. In-line equipment can be easily constructed by incorporating only the plasma generation part into existing equipment or new equipment.
・High-speed plasma processing is possible with pinpoint accuracy in targeted areas.
・Equipped with input/output control function with existing equipment as standard. Possible to control plasma irradiation ON/OFF using signals from existing equipment.
■Application examples
・Resist ashing
・Plasma cleaning in semiconductor packaging process
・Bump pretreatment/lead frame cleaning
・Surface modification (hydrophilicization) of metals, resins, and other materials
・Organic matter removal/plasma cleaning
・Sterilization
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Product
Plasma products D-AiPlasma atmospheric pressure plasma equipment
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Handling Company
Denshi Giken Co., Ltd.
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Categories
1 Models of Plasma products D-AiPlasma atmospheric pressure plasma equipment
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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D-AiPlasma |
Available upon quote |
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About Company Handling This Product
- Japan