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  4. Plasma products Parallel plate type reduced pressure plasma equipment (Denshi Giken Co., Ltd.)
Plasma products Parallel plate type reduced pressure plasma equipment-Parallel plate type reduced pressure plasma device
Plasma products Parallel plate type reduced pressure plasma equipment-Denshi Giken Co., Ltd.

Plasma products Parallel plate type reduced pressure plasma equipment
Denshi Giken Co., Ltd.

About This Product

■Summary

This is a plasma device that can precisely process substrate surfaces with anisotropy using reactive ion etching (RIE) plasma. We can perform processing unique to anisotropic plasma, such as etching of substrate circuits, desmear at the bottom of fine vias, and sputter cleaning. Of course, plasma etching mode (PE mode) is also available.

■Features

・Can process medium-sized substrates, films, etc. An automatic conveyance system option can also be added. ・Electrode size and RF output specifications can be customized according to the application.

■Application examples

・Various functional group modifications Surface modification treatment (hydrophilic/water repellent/improved adhesion/reduction) ・Pre-plating treatment for various substrates such as fluororesin ・Adhesive-free bonding pretreatment for various substrates such as fluororesin ・Resist ashing/insulating film etching ・Desmear/Descum ・Organic matter removal ・Low temperature sintering

  • Product

    Plasma products Parallel plate type reduced pressure plasma equipment

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1 Models of Plasma products Parallel plate type reduced pressure plasma equipment

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Plasma products Parallel plate type reduced pressure plasma equipment-Part Number-Parallel plate type reduced pressure plasma device

Parallel plate type reduced pressure plasma device

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About Company Handling This Product

Denshi Giken Co., Ltd.

  • Japan

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