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  4. Highly reliable data acquisition residual gas analyzer (Cons Technology Co., Ltd.)
Highly reliable data acquisition residual gas analyzer-RGA100
Highly reliable data acquisition residual gas analyzer-Cons Technology Co., Ltd.

Highly reliable data acquisition residual gas analyzer
Cons Technology Co., Ltd.

About This Product

It is a quartzed mass analyzer that is the basis of SRS mass filter. Not only reliable data acquisition, but also high -priced and high maintenance performance, such as the easy replacement of filament and electron multi -pri (EM). The model can be selected by the target mass range.

■ Principles and mechanisms of residual gas analyzers

The device used to confirm the ingredients in the gas and the quality of the vacuum condition is a residual gas analyzer (process gas monitor) and is also called the residual gas analyzer. The residual gas analyzer is mainly composed of three parts, and the gas subject to the analysis is analyzed through the process of "ion source", "mass separation portion", and "detection portion". First of all, the gas that is the sample collides with the thermoelectric heated by the ion source and is ionized. Next, the sample ions in the mass separation portion are separated by each mass of ions and sent to the detection portion in order. The mass separation portion is composed of four parallel -shaped electrodes, and the mass of ions is performed by applying a DC voltage and a high -frequency voltage to them. An analyzer of this structure is called a "quartet analyzer". Finally, the sample ion in the detection portion collides with the electrode to produce secondary electrons. This electron is amplified while repeated collisions in the detection unit, and the gas composition can be analyzed by reading the signal.

■ Main use

・ Semiconductor manufacturing equipment process monitor ・ LCD, organic EL panel manufacturing equipment process monitor ・ R & D such as heat rising extermination gas analysis ・ R & D of solar power generation system ·Environmental measurement Cons Technology handles three models, RGA100, RGA200, and RGA300, depending on the application.

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    Highly reliable data acquisition residual gas analyzer

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3 Models of Highly reliable data acquisition residual gas analyzer

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Mass range resolution Dynamic range Division of pressure others option
Highly reliable data acquisition residual gas analyzer-Part Number-RGA100

RGA100

Available upon quote

100amu

1AMU

6 digits (single scan)

5 × 10-14TORR (when EM difference)

Real -time Windows software display mode
Mass spectra, leaked tector, true air -level vs time
Multi -head operation

Secondary electronic multiplent tube option (EM)
AEON Counting Output Options
Ethernet adapter options

Highly reliable data acquisition residual gas analyzer-Part Number-RGA200

RGA200

Available upon quote

200amu

1AMU

6 digits (single scan)

5 × 10-14TORR (when EM difference)

Real -time Windows software display mode
Mass spectra, leaked tector, true air -level vs time
Multi -head operation

Secondary electronic multiplent tube option (EM)
AEON Counting Output Options
Ethernet adapter options

Highly reliable data acquisition residual gas analyzer-Part Number-RGA300

RGA300

Available upon quote

300AMU

1AMU

6 digits (single scan)

5 × 10-14TORR (when EM difference)

Real -time Windows software display mode
Mass spectra, leaked tector, true air -level vs time
Multi -head operation

Secondary electronic multiplent tube option (EM)
AEON Counting Output Options
Ethernet adapter options

Click on the part number for more information about each product

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About Company Handling This Product

Cons Technology Co., Ltd.

  • Japan

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