Highly reliable data acquisition residual gas analyzer
Cons Technology Co., Ltd.
About This Product
It is a quartzed mass analyzer that is the basis of SRS mass filter. Not only reliable data acquisition, but also high -priced and high maintenance performance, such as the easy replacement of filament and electron multi -pri (EM). The model can be selected by the target mass range.
■ Principles and mechanisms of residual gas analyzers
The device used to confirm the ingredients in the gas and the quality of the vacuum condition is a residual gas analyzer (process gas monitor) and is also called the residual gas analyzer. The residual gas analyzer is mainly composed of three parts, and the gas subject to the analysis is analyzed through the process of "ion source", "mass separation portion", and "detection portion". First of all, the gas that is the sample collides with the thermoelectric heated by the ion source and is ionized.
Next, the sample ions in the mass separation portion are separated by each mass of ions and sent to the detection portion in order. The mass separation portion is composed of four parallel -shaped electrodes, and the mass of ions is performed by applying a DC voltage and a high -frequency voltage to them. An analyzer of this structure is called a "quartet analyzer".
Finally, the sample ion in the detection portion collides with the electrode to produce secondary electrons. This electron is amplified while repeated collisions in the detection unit, and the gas composition can be analyzed by reading the signal.
■ Main use
・ Semiconductor manufacturing equipment process monitor
・ LCD, organic EL panel manufacturing equipment process monitor
・ R & D such as heat rising extermination gas analysis
・ R & D of solar power generation system
·Environmental measurement
Cons Technology handles three models, RGA100, RGA200, and RGA300, depending on the application.
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Product
Highly reliable data acquisition residual gas analyzer
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Handling Company
Cons Technology Co., Ltd.
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Categories
3 Models of Highly reliable data acquisition residual gas analyzer
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Division of pressure | Dynamic range | Mass range | option | others | resolution |
|---|---|---|---|---|---|---|---|---|
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RGA100 |
Available upon quote | 5 × 10-14TORR (when EM difference) | 6 digits (single scan) | 100amu |
Secondary electronic multiplent tube option (EM) AEON Counting Output Options Ethernet adapter options |
Real -time Windows software display mode Mass spectra, leaked tector, true air -level vs time Multi -head operation |
1AMU |
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RGA200 |
Available upon quote | 5 × 10-14TORR (when EM difference) | 6 digits (single scan) | 200amu |
Secondary electronic multiplent tube option (EM) AEON Counting Output Options Ethernet adapter options |
Real -time Windows software display mode Mass spectra, leaked tector, true air -level vs time Multi -head operation |
1AMU |
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RGA300 |
Available upon quote | 5 × 10-14TORR (when EM difference) | 6 digits (single scan) | 300AMU |
Secondary electronic multiplent tube option (EM) AEON Counting Output Options Ethernet adapter options |
Real -time Windows software display mode Mass spectra, leaked tector, true air -level vs time Multi -head operation |
1AMU |
Click on the part number for more information about each product
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