Diamon drapping method precision polishing system dedicated device
Musashino Denshi, INC.
About This Product
■ Features
The precision polishing device of Musashino Electronics has continued to improve driving systems and rigidity due to the know -how of the equipment design cultivated over many years. Vibration and noise are minimized, and sample polishing can be performed in any scene. By selecting a sample holding unit and sample holder suitable for the sample you want to process, polishing has been achieved according to various sample shape and processing purpose. A variant sample that cannot be used with a standard holder can be processed by using a custom product.
By properly selecting the abrasive / abrasive, the sample of various materials can be used for the mirror finish, and the CMP (chemical mechanical polishing) can be supported. Equipped with functions such as interlock mechanism, electric leakage breaker, emergency stop switch, etc., we realize polishing work that takes into account the safety of workers.
■ Specifications
Our precision polishing system is a new system called diamon drapping. The most suitable composite material for precision polishing using diamond abrasive grains is used for the grinding board and wrapping board (abrasive). Since the polishing plate has little thermal deformation and can maintain a flat degree during polishing, a sample with different hardness can be polished flat, and the flatness is λ/10 or less, the surface is 0.01 μm or less. Is possible.
Since the polishing plate is easy to process the mechanical, it can be performed by attaching the attachment to the abrasive device with reproducibility with reproducibility. By this operation, it is possible to zero the surface blurring of the board. This attachment can only be mounted on the precision polishing device of the E-type (MA-200E, MA-300E, MA-400E).
Due to the structure, the polishing device is designed to guarantee high accuracy, and the surface blurring is finished within 5 μm.
By using an automatic spray device using a diamond slurry, it is possible to perform economical polishing work without human resources. By installing a cylindrical sample holder on the abrasive, the holder rotates due to the difference between the outer peripheral speed and the inner perimony, and the sample is polished by the rotation of the abrasive and the rotation of the holder. Forced drive devices can also be installed.
We will prepare abundant sample holders. X -ray Folding optical system The use of a wrapping attachment with a two -axis metal metal meter is possible, making it possible to polish while modifying the crystal orientation. In addition, various vacuum chuck type holders, holder swinging devices with diamond stopper, etc. are available.
■ Others
・ It is the best device when you want to polish easily.
・ You can do hand -polishing work while pouring water.
・ Φ203mm aluminum board ・ Store ring is standard equipment.
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Product
Diamon drapping method precision polishing system dedicated device