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  4. Semiconductor wafer cathodoluminescence microscope system Santis300 capable of wafer measurement, ultra-high sensitivity, ultra-high speed, and dramatic improvement in feedback time (Tokyo Instruments, Inc)
Semiconductor wafer cathodoluminescence microscope system Santis300 capable of wafer measurement, ultra-high sensitivity, ultra-high speed, and dramatic improvement in feedback time-Santis300
Semiconductor wafer cathodoluminescence microscope system Santis300 capable of wafer measurement, ultra-high sensitivity, ultra-high speed, and dramatic improvement in feedback time-Tokyo Instruments, Inc

Semiconductor wafer cathodoluminescence microscope system Santis300 capable of wafer measurement, ultra-high sensitivity, ultra-high speed, and dramatic improvement in feedback time
Tokyo Instruments, Inc

Tokyo Instruments, Inc's Response Status

Response Rate

100.0%

Response Time

28.2hours

Relatively Fast Response

About This Product

■Summary

This is the world's only ultra-high-sensitivity cathodoluminescence microscope system manufactured by Attolight that fully integrates SEM and cathodoluminescence (CL) optical systems, and is compatible with semiconductor wafers (GaN, SiC, etc.). Inheriting the features of the basic model, there is no need for any troublesome optical adjustments, a wide field of view without distortion, and high-speed spectral mapping, making it possible to analyze wafers without cutting them. Capable of acquiring SEM images and CL images simultaneously, and supports everything from small wafers to 300mm wafers. In the semiconductor device manufacturing process, it enables wafer-level evaluation and dramatically improves feedback time from days to minutes.

■Features

・Ideal for wide gap materials such as GaN ・One machine can handle everything from the entire wafer area to local analysis. ・Completely integrated SEM and cathodoluminescence (CL) ・Simultaneous acquisition of SEM and CL images

■Usage/Application

Semiconductor failure analysis, material evaluation, quality control

  • Product

    Semiconductor wafer cathodoluminescence microscope system Santis300 capable of wafer measurement, ultra-high sensitivity, ultra-high speed, and dramatic improvement in feedback time

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1 Models of Semiconductor wafer cathodoluminescence microscope system Santis300 capable of wafer measurement, ultra-high sensitivity, ultra-high speed, and dramatic improvement in feedback time

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Semiconductor wafer cathodoluminescence microscope system Santis300 capable of wafer measurement, ultra-high sensitivity, ultra-high speed, and dramatic improvement in feedback time-Part Number-Santis300

Santis300

Available upon quote

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About Company Handling This Product

Tokyo Instruments, Inc

Response Rate

100.0%

Response Time

28.2hrs

Company Overview

Tokyo Instruments, Inc., established in 1981, and headquartered in Tokyo, Japan, is a manufacturer of opto-ele...

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