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Low temperature and ultra-high sensitivity cathodoluminescence microscope system Allalin-Allalin
Low temperature and ultra-high sensitivity cathodoluminescence microscope system Allalin-Tokyo Instruments, Inc

Low temperature and ultra-high sensitivity cathodoluminescence microscope system Allalin
Tokyo Instruments, Inc

Tokyo Instruments, Inc's Response Status

Response Rate

100.0%

Response Time

24.1hours

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About This Product

■Summary

Attolight's world's only low-temperature, ultra-high-sensitivity cathodoluminescence microscope system that completely integrates an SEM and cathodoluminescence optical system. With a unique optical design that does not require any troublesome optical adjustments, it covers up to DUV-NIR and achieves a wide observation field without distortion, high-speed spectral mapping, and low-temperature measurement. Furthermore, in combination with a streak camera, picosecond time-resolved measurements are also possible. This microscope system overturns the conventional wisdom of CL-SEM, and can be used for everything from basic research and development to industrial applications such as quality control.

■Features

・Integrated electron lens and high NA (0.71) optical objective lens ・Observe the CL image in the same field of view as the SEM image ・No need for troublesome mirror adjustments ・Ultra-high sensitivity and high-speed mapping measurement ・Wide observation field without distortion: ~ 300 μm ・Integrated operation and measurement of SEM and CL ・Observation wavelength: 180 nm ~ 1.6 um ・High-precision 6-axis stage ・Low temperature measurement: 10K ~ ・Picosecond time-resolved measurement using pulsed electron source ・Photoluminescence (PL) measurement

■Applications

・Evaluation of LED materials ・Evaluation of wide gap materials (GaN, SiC, Ga2O3) ・Development, quality control, and failure analysis of solar cells and power devices, etc. ・Evaluation of nanoscale optical devices (plasmonics) ・Observation of fluorescence lifetime and dynamics of carriers ・Simultaneous combined measurement of EBIC image/CL image/SEM image

■Optical microscope

・Optical microscope built into the electron optical system ・Objective lens: Achromatic reflective objective lens, wavelength 180 nm to 1.6 μm ・Numerical aperture: NA 0.71 (f/0.5) ・Observation field of view: > 300μm (electron and optical microscope) ・Optical microscope resolution: < 5μm ・Light collection efficiency: 30% over the entire field of view (for Lambertian reflection)

■Nano positioning stage

・Sample diameter: φ25 x t1.5 mm ・Arbitrary movement with 6 degrees of freedom (cryostat option supported) ・Stroke: 25 mm (X, Y axis), 3 mm (Z axis), 3° tilt (X, Y axis), 35° rotation (Z axis) ・Minimum movement unit: 1 nm ・Position repeatability: 100 nm (full stroke), < 2 nm (100 nm range)

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    Low temperature and ultra-high sensitivity cathodoluminescence microscope system Allalin

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1 Models of Low temperature and ultra-high sensitivity cathodoluminescence microscope system Allalin

Image Part Number Price (excluding tax) Electron gun Electron optical system Measurement mode Detector Spectrometer Operating environment temperature Chamber/vacuum system System weight Cryostat (optional)
Low temperature and ultra-high sensitivity cathodoluminescence microscope system Allalin-Part Number-Allalin

Allalin

Available upon quote

Schottky electron gun: continuous mode/time resolved mode (optional)
Accelerating voltage: 3~10 kV
Probe current: 1 pA~20 nA

Electron optical lens barrel with built-in electromagnetic lens, polarizing element, and aberration correction system
Optimized for both continuous and time-resolved modes
Spatial resolution: < 10 nm (3~10 kV)
Working distance: 3mm

Optical microscope imaging
Cathodoluminescence (CL) mapping (multicolor, monochrome, hyperspectral)
Secondary electron (SE) mapping
Time-resolved CL mapping (optional)
Simultaneous SE and CL imaging

PMT (port 1)
CCD (port 2)
UV-VIS streak camera (time resolution option, minimum time resolution 10 ps)

Dispersive imaging spectrometer
Number of exit ports: 2
Focal length 320nm
Number of diffraction gratings: 3 (specify the specifications of each diffraction grating at the time of order)

20±3℃, humidity 70% or less

Ion getter pump for electron gun (differential pump)
Turbo molecular pump for chamber
Chamber size: 208 mm (diameter) x 300 mm (height)

Cathodoluminescence system: 250 kg
Optical table: 650 kg

Low vibration helium cold finger
Temperature range: 20~300K
digital temperature controller

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About Company Handling This Product

Response Rate

100.0%


Response Time

24.1hrs

Company Overview

Tokyo Instruments, Inc., established in 1981, and headquartered in Tokyo, Japan, is a manufacturer of opto-ele...

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  • Japan

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