Stepping motor vacuum type (vacuum level 10-5 to 10-4Pa)
Oriental Motor Co., Ltd.
About This Product
■Summary
・Used in a vacuum environment of 10-5 to 10-4Pa
・AC/DC input
■Characteristics and structure of vacuum type motor
・In order to suppress gas emissions, the motor case is made of aluminum and stainless steel, and the surface is not painted. Additionally, vacuum grease is used for the bearings.
-The released gas is the same as the components found in a normal clean environment, so there is no need to worry about contaminating the vacuum environment.
- Uses heat-resistant windings to withstand baking temperatures.
■Miniaturize the device and expand the degree of freedom in design
When installing a motor in the atmosphere, the equipment becomes large because a rotation introduction device is used. The vacuum type allows the motor to be installed in a vacuum environment, making the device more compact. Furthermore, the αSTEP AR series eliminates the need for a sensor for position confirmation, contributing to cost reduction.
■With the αSTEP AR series, position monitoring is possible without an encoder.
The αSTEP AR series monitors motor information using closed-loop control and is equipped with various alarm output functions. Eliminates the need for expensive vacuum compatible encoders. Equipped with a rotor position detection sensor (resolver) to detect motor information and control the motor.
■Achieve various movements in vacuum
They are used in a variety of applications, including semiconductor manufacturing equipment and measurement equipment such as electron microscopes. Vacuum type motors are compatible with multi-axis stages in vacuum environments, which is difficult to design with rotary introduction machines. It is possible to combine multiple axes in a vacuum, making it possible to realize more complex movements.
■The low-loss αSTEP AR series is ideal for analysis and processing applications in vacuum.
It is useful for positioning applications in vacuum environments, such as material analysis in low vacuum, high-power laser processing, and vacuum film deposition.
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Product
Stepping motor vacuum type (vacuum level 10-5 to 10-4Pa)
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Handling Company
Oriental Motor Co., Ltd.
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Categories
1 Models of Stepping motor vacuum type (vacuum level 10-5 to 10-4Pa)
| Product Image | Part Number | Price (excluding tax) | Basic step angle (°) | Degree of vacuum (Pa) | Mass (kg) | Mounting angle dimension (mm) 42 | Mounting angle dimension (mm) 60 | Mounting angle dimension (mm) 85 | Power input |
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ΑSTEP AR series vacuum type |
Available upon quote | 0.36 | 45570 | 0.47~1.9 | ● | ● | ● | A.C. |
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About Company Handling This Product
- Japan