Product
High frequency power supply auto matching box, etc. High frequency plasma processing equipment RPT-3000-05Handling Company
Japan Koshuha Co., Ltd.Categories
Product Image | Part Number | Price (excluding tax) | Furnace body Furnace body dimensions | Furnace body material | Furnace body ultimate vacuum | Furnace body viewing window | Furnace shape | High frequency output power | Utility cooling water | Utility power |
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RPT-3000-05 |
Available upon quote | Approximately φ500mm×500mm | Made of aluminum | Regular use 1×10-2 torr | Effective diameter φ100mm | Horizontal front door method | 0~500W | 3L/min or more | 3 phase AC200V approx. 4.5kVA |