Various FPD components The beam shape is the same throughout the entire scanning width, enabling high-precision writing Telecenter fθ Laser direct writing equipment-Y Drive Co., Ltd.

LSU-1002 | Various FPD components The beam shape is the same throughout the entire scanning width, enabling high-precision writing Telecenter fθ Laser direct writing equipment
Y Drive Co., Ltd.

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Air chuck table

Data format

Data resolution

Focus confirmation unit

Focus unit (manual operation)

Laser scanning width

Laser spot diameter (@laser wavelength 405nm)

Laser wavelength

Reference hole position adjustment function

Repeated exposure function

Body external dimensions

See all 4 models in list

Part Number
LSU-1002

Product
Various FPD components The beam shape is the same throughout the entire scanning width, enabling high-precision writing Telecenter fθ Laser direct writing equipment

Handling Company
Y Drive Co., Ltd.

Categories

Semiconductor Manufacturing

Electron Beam Lithography Systems

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Last viewed: 3 hours ago

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Various FPD components The beam shape is the same throughout the entire scanning width, enabling high-precision writing Telecenter fθ Laser direct writing equipment LSU-1002's performance table

Image	Price (excluding tax)	Air chuck table	Data format	Data resolution	Focus confirmation unit	Focus unit (manual operation)	Laser scanning width	Laser spot diameter (@laser wavelength 405nm)	Laser wavelength	Reference hole position adjustment function	Repeated exposure function
	Available upon quote	Ceramic table or aluminum table	Bitmap (BMP)	~25,400dpi	CCD camera optical unit, monitor: Focus using the Z stage while checking the focus status of the exposed surface	Z stage	10mm	2μm	375,405,650,780,830nm (semiconductor laser) 355,488,532nm (solid-state laser)	Reference hole confirmation optical system, monitor, X-axis and θ-axis stage; Exposure positioning mechanism from reference pins and marks	A function to expose a job any number of times in the stage feed direction

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