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  1. Metoree
  2. Semiconductor Manufacturing
  3. Electron Beam Lithography Systems
  4. Various FPD components The beam shape is the same throughout the entire scanning width, enabling high-precision writing Telecenter fθ Laser direct writing equipment
  5. LSU-1002
Various FPD components The beam shape is the same throughout the entire scanning width, enabling high-precision writing Telecenter fθ Laser direct writing equipment-Y Drive Co., Ltd.

LSU-1002 | Various FPD components The beam shape is the same throughout the entire scanning width, enabling high-precision writing Telecenter fθ Laser direct writing equipment
Y Drive Co., Ltd.

Price (excluding tax)

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Y Drive Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

94.6hours

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Air chuck table

Data format

Data resolution

Focus confirmation unit

Focus unit (manual operation)

Laser scanning width

Laser spot diameter (@laser wavelength 405nm)

Laser wavelength

Reference hole position adjustment function

Repeated exposure function

Body external dimensions

See all 4 models in list

  • Part Number

    LSU-1002

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Various FPD components The beam shape is the same throughout the entire scanning width, enabling high-precision writing Telecenter fθ Laser direct writing equipment LSU-1002's performance table

Image Price (excluding tax) Air chuck table Data format Data resolution Focus confirmation unit Focus unit (manual operation) Laser scanning width Laser spot diameter (@laser wavelength 405nm) Laser wavelength Reference hole position adjustment function Repeated exposure function
Various FPD components The beam shape is the same throughout the entire scanning width, enabling high-precision writing Telecenter fθ Laser direct writing equipment-Part Number-LSU-1002 Available upon quote Ceramic table or aluminum table Bitmap (BMP) ~25,400dpi CCD camera optical unit, monitor: Focus using the Z stage while checking the focus status of the exposed surface Z stage 10mm 2μm 375,405,650,780,830nm (semiconductor laser) 355,488,532nm (solid-state laser) Reference hole confirmation optical system, monitor, X-axis and θ-axis stage; Exposure positioning mechanism from reference pins and marks A function to expose a job any number of times in the stage feed direction

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About Company Handling This Product

Y Drive Co., Ltd.

Response Rate

100.0%

Response Time

94.6hrs

  • Japan

Category of this product

Electron Beam Lithography Systems

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