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Mass flow meter-Japan Star Techno Co., Ltd.

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Model Description

■Features ・Maximum operating pressure is 320PSIA (2.2MPaA). - Compatible with 98 types of gas like the standard type. ・Voltage resistance is 400PSIA (2.7MPaA).


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Dimensions (flow range 0.5SCCM)

Port size (flow range 0.5SCCM)

Pressure loss at F.S. flow rate

See all 7 models in list
  • Part Number

    MQ series (high pressure type)

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Mass flow meter MQ series (high pressure type)'s performance table

Image Price (excluding tax) Dimensions (flow range 0.5SCCM) Port size (flow range 0.5SCCM) Pressure loss at F.S. flow rate
Mass flow meter-Part Number-MQ series (high pressure type) Available upon quote H98.98mm x W60.33mm x D26.67mm M5 (10-32) female thread 6.89kPa (D)

There are 7 models for this product.

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