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■Features - Compatible with 130 types of gases, including corrosive gases and refrigerant gases, in addition to standard gas types. -Material: 316L stainless steel, FFKM (Kalrez). ・Supports the same functions and options as the standard type.
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Dimensions (flow range 0.5SCCM)
Port size (flow range 0.5SCCM)
Pressure loss at F.S. flow rate
Part Number
MS series (compatible with corrosive gas/refrigerant gas)Product
Mass flow meterHandling Company
Japan Star Techno Co., Ltd.Categories
Image | Price (excluding tax) | Dimensions (flow range 0.5SCCM) | Port size (flow range 0.5SCCM) | Pressure loss at F.S. flow rate |
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Available upon quote | H111.68mm x W60.33mm x D26.67mm | M5 (10-32) female thread | 6.89kPa (D) |
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Reviews shown here are reviews of companies.
Response Rate
100.0%
Response Time
8.9hrs