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Mass flow meter-Japan Star Techno Co., Ltd.

Price (excluding tax)

Estimate Required

Japan Star Techno Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

8.9hours

Fast Response


Model Description

■Features - Compatible with 98 types of gases including mixed gases. ・10ms fast response with ±0.6% RD (16.7~100% FS) accuracy. ・Lineup ranges from ultra-micro flow rate (0.5SCCM) to large flow rate (5000SLPM).


Model Filter

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Dimensions (flow range 0.5SCCM)

Port size (flow range 0.5SCCM)

Pressure loss at F.S. flow rate

See all 7 models in list
  • Part Number

    M series (standard type)

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Mass flow meter M series (standard type)'s performance table

Image Price (excluding tax) Dimensions (flow range 0.5SCCM) Port size (flow range 0.5SCCM) Pressure loss at F.S. flow rate
Mass flow meter-Part Number-M series (standard type) Available upon quote H98.98mm x W60.33mm x D26.67mm M5 (10-32) female thread 6.89kPa (D)

There are 7 models for this product.

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About Company Handling This Product

Response Rate

100.0%


Response Time

8.9hrs

  • Japan

Category of this product

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