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Price (excluding tax)
Response Rate
100.0%
Response Time
8.9hours
Fast Response
■Features - Compatible with 98 types of gases including mixed gases. ・10ms fast response with ±0.6% RD (16.7~100% FS) accuracy. ・Lineup ranges from ultra-micro flow rate (0.5SCCM) to large flow rate (5000SLPM).
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Dimensions (flow range 0.5SCCM)
Port size (flow range 0.5SCCM)
Pressure loss at F.S. flow rate
Part Number
M series (standard type)Product
Mass flow meterHandling Company
Japan Star Techno Co., Ltd.Categories
Image | Price (excluding tax) | Dimensions (flow range 0.5SCCM) | Port size (flow range 0.5SCCM) | Pressure loss at F.S. flow rate |
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Available upon quote | H98.98mm x W60.33mm x D26.67mm | M5 (10-32) female thread | 6.89kPa (D) |
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Reviews shown here are reviews of companies.
Response Rate
100.0%
Response Time
8.9hrs