ULVAC Sales Co., Ltd.'s Sputtering Equipment

■Summary The multi-chamber device ENTRONTM N300 is a just-fit device that provides appropriate investment efficiency. In addition to PVD and CVD, i...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The ENTRONTM-EX2 W300 multi-chamber sputtering system is a state-of-the-art platform that connects a variety of processes. This is a high-...

• Machining / Machine Tools

• Sputtering Equipment

■Summary This is a device that can be used in a wide range of applications, based on ULVAC's extensive film-forming technology and experience. Achi...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The SCH series is a horizontal in-line sputtering system that forms transparent conductive films, metal films, etc. It is compatible with ...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The SMD series is a single-wafer sputtering system that forms metal films, ITO, IGZO, dielectric films, etc. We have a rich track record o...

• Machining / Machine Tools

• Sputtering Equipment

■Summary This is a multi-chamber sputtering system that can have multiple process chambers (up to 3 200E, up to 5 200J, and up to 7 200). ■Applica...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The SPW series is a roll-up type sputtering device that can form multilayer films such as optical films and metals on plastic films. By se...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The SRH series backside/mounting sputtering equipment is a mass production equipment intended for metal film formation for power devices, ...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The SV series is a vertical batch type sputtering device. There is the SV-200, which is dedicated to disk stampers, and the carousel type,...

• Machining / Machine Tools

• Sputtering Equipment

■Summary The ULDiS series of sputtering systems for optical films is a digital sputtering system that is an advanced version of Metamode® technolog...

• Machining / Machine Tools

• Sputtering Equipment