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This section provides an overview for etching equipment as well as their applications and principles. Also, please take a look at the list of 15 etching equipment manufacturers and their company rankings. Here are the top-ranked etching equipment companies as of December, 2024: 1.Hitachi High-Tech America, Inc., 2.Masteretch Services, 3.Videojet Technologies, Inc..
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Engaged in research on nitride semiconductor growth using the MBE method at Waseda University Graduate School. After graduating from graduate school in 2016, he joined a non-ferrous metal manufacturer.
Engaged in equipment maintenance and engineering work at metal smelting plants. Moved to a chemical manufacturer in 2022. Engaging in similar tasks.
Etching equipment is used in the etching process of semiconductor manufacturing.
The etching process is a technology that cuts or dissolves the surface of the processed object. Etching equipment performs etching processes on thin films and other materials formed on semiconductor wafers and is indispensable for the manufacture of CPUs and other electronic devices.
As electronic devices have become more sophisticated in recent years, etching is required to achieve finer and finer processing. The process has also become more complex, and multiple etching equipment is often used to manufacture a single electronic component.
Etching equipment is indispensable for the manufacture of electronic devices. Specific applications are as follows:
Photolithography, used in the manufacture of these products, is a technology that processes the surface of an object by applying light on top of an applied photosensitive material. One of the processes of photolithography is etching.
In the etching process, areas of the oxide film on the wafer that is coated with resist remain, while areas that are not coated with resist peel off. Unevenness is created and a pattern is formed.
Etching equipment is classified into two types: wet etching and dry etching.
Wet etching is a process that dissolves oxide film using acid or alkaline chemical solutions. A large number of sheets can be processed at one time, and production quality is stable.
Since the chemical solution is relatively inexpensive, it can be manufactured at a low cost. However, since etching proceeds in one direction, vertical processing is not possible (1 μm is the limit).
Dry etching is an etching process that does not use chemicals. Plasma etching is the most widely used dry etching method. Plasma etching is a method in which gas is plasmaized under a vacuum with high voltage.
There are two types of plasma etching methods, dielectric coupling type, and microwave type, both of which use a high-frequency power supply. This method uses the generated plasma to scrape the surface of the object and is more expensive than wet etching. However, it is possible to process grooves as fine as 100 nm to 1,000 nm.
Other types of plasma etching include ion etching by ion impact and gas etching that uses gas, both of which require vacuum equipment.
The global electronics market continues to expand, and the semiconductor industry, which supports this expansion, is becoming increasingly important. The global market for semiconductors is expanding despite experiencing recessions such as the Lehman Shock.
In recent years, the development of technologies to further miniaturize storage media by using a 3D structure is flourishing. Therefore, etching equipment is becoming even more important as a core technology for 3D.
The etching equipment consumption market size was 1,389.3 billion yen in 2018. The market shares by consumption region are South Korea (28%), China (19%), Japan (19%), Taiwan (14%), and the United States (10%). Also, vendor share by nationality in 2018 was the U.S. (64%) and Japan (32%), As of 2018, the U.S. and Japanese companies oligopoly in the market.
Dry etching is one of the microfabrication technologies, and many types of etching equipment are available depending on the material to be processed. However, equipment mainly targeting semiconductors and metals, such as silicon and metal wiring, is the mainstream. Insulating film dry etching equipment accounts for a high percentage of the equipment used in normal semiconductor plants.
In 2017, the dry etching equipment market was worth US$10.7 billion.
The rapid growth of the dry etching equipment market is attributed to the increasing three-dimensional structure of memory. As miniaturization progresses, dry etching processes increase and flash memory has developed a three-dimensional structure.
Various processes are required to form the cells of 3D NAND flash memory. In particular, deep channel hole processing is difficult and requires a long etching process. In semiconductor memory factories, the number of pieces processed per hour is critical. Therefore, the number of dry etching equipment installed is increased to ensure processing capacity.
*Including some distributors, etc.
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Videojet Technologies, Inc., based in Wood Dale, Illinois, and founded in the 1960s as a division of the A.B. Dick Company is a manufacturer of product identification equipment designed for coding and marking. Its diverse range of solutions encompasses large and small character inkjet printers, laser coding systems, thermal transfer printers, and labeling equipment. These systems are utilized for the application of variable data, including by dates, production dates, lot numbers, and traceability information, as well as linear and 2D barcodes, onto an extensive array of product packaging, industrial components, shipping cases, and pallets.
Hitachi High Tech was established in April 1947 and operates in 26 countries with products and services ranging from semiconductor manufacturing equipment and Medical and Biosystems to Analytical Systems and Manufacturing related equipment and solutions. A unique state-of-the-art technology company with two functions as a manufacturer and a trading company with the motto of "Tackling social issues," the Hitachi High-Tech Group aspires to be a company that pursues not only economic value, such as revenue and profit, but also provides social and environmental value by contributing to resolving social issues through its business activities, including products and services. They also provide one-stop services, such as evaluations and analysis at a global level.
SHINKO SEIKI CO., LTD., established in 1949, and located in Kobe, Japan, is a manufacturer of vacuum devices, electric furnaces and semiconductor manufacturing equipment. Its product line includes a vast array of vacuum pumps such as mechanical booster pumps, vacuum exhaust unit, oil sealed rotary vacuum pumps and water ring vacuum pumps. Its product range also inlcudes soldering equipments, optical inspection equipments, thin film forming equipments, and plasma processing equipments. The company holds several certification for its operation such as the ISO 14004, and the ISO 9001.
Shibaura Mechatronics Corporation, established in 1939 and headquartered in Yokohama, Japan, is a manufacturer and supplier of various production equipment. Its product line encompasses FPD manufacturing equipments that include array process, cell process, and module process equipment. ALso offered are semiconductor manufacturing equipment, vacuum equipment, and other equipment used in applications related to manufacturing equipment. The company also develops and manufactures vending machines compatible with numerous electronic payment systems, including credit cards and electronic money.
Samco Inc, founded in 1979 and headquartered in Kyoto, Japan, is a manufacturer and supplier specializing in semiconductor and electronic component manufacturing systems. The company's product portfolio includes low-stress chemical vapor deposition systems, atomic layer deposition systems, reactive ion etching systems, plasma cleaners, and Aqua Plasma Cleaners. These products are applied in various industries, including semiconductor manufacturing, the electronics industry, optoelectronics, photonics, and biotechnology. The company has office locations overseas, including China, the USA, Singapore, Malaysia, and Liechtenstein.
Showa Shinku Co. Ltd., founded in 1953 and headquartered in Tokyo, Japan, is a manufacturer of vacuum equipment and components for quartz devices, optical thin films, and more. Its product line features vacuum evaporation equipment, sputtering equipment, ion plating equipment, atomic layer deposition equipment, and dry etching and ashing equipment. These products are integral to various manufacturing processes, particularly in the production of quartz devices, which hold significant importance in industrial applications.
Founded in Osaka, Japan in 1950, Osaka Vacuum, Ltd. is a manufacturer of vacuum pumps and systems that holds the ISO14001 certification. Their extensive product line includes a wide range of vacuum pumps, such as dry, turbo molecular, liquid ring, and root pumps. oil-sealed rotary pumps, ejectors, and other vacuum equipment are also offered. They also provide vacuum systems for various applications such as general vacuum exhaust, freezing, drying, etching, distillation, polymerization, and more, serving markets including semiconductor, solar, iron and steel, textile, food, oil, atomic energy, and many others.
Sumitomo Precision Products Co. Ltd., established in 1961 and headquartered in Amagasaki, Japan, is a manufacturer of several products, including hydraulic controls, semiconductor manufacturing equipment, aerospace equipment, and environmental systems. It began manufacturing large heat exchangers in 1963, large propellers in 1967, and LNG vaporizers in 1969. In 1974, it began making ozone generators, and in 1988, it started manufacturing equipment for space applications. The company is ISO 14001 certified, and its product portfolio includes landing gear systems for commercial flights, high-temperature heat exchangers, coolant components for machine tools, LNG vaporizers, and silicon oxide sacrificial layer etching systems.
Ulvac Inc., established in 1952 and headquartered in Kanagawa, Japan, is a manufacturer of vacuum equipment, components, peripheral devices, and materials for the solar cell and semiconductor industries, among others. The company operates businesses in six areas, including materials, components, electronic devices, semiconductors, and flat panel display production equipment. Some of its products include roll coaters, semiconductor production equipment, LED production equipment, leak detectors, and vacuum brazing furnaces. It is ISO9001 certified, and its net sales in the 2022 fiscal year were 227.5 billion Japanese Yen, with 34% of this amount coming from semiconductor and electronic device production equipment.
ShinMaywa Industries, Ltd. was established in 1949 and headquartered in Hyogo, Japan is a manufacturer of aircraft, special purpose trucks, water treatment equipment, and wire processing systems among others. The company offers an extensive and diversified product portfolio including aircraft passenger boarding bridges, industrial machinery, thin films and surface modification, thin film coating systems, and built-in DD direct drive motors among others. These products and services are instrumental in enhancing and sustaining environmental amenities, delivering advanced processing and treatment capabilities, providing enhanced surface modifications, and contributing to the development of urban environments in our motorized society.
Yugma Impressions, established in 2004 and located in Maharashtra, India, is a manufacturer and supplier of electrochemical etching machines and consumables. The company specializes in custom solutions for both automatic and semi-automatic processes suitable for various applications. It specialized in implementing complete plant automation projects for chemical etching, used to mark numbers, emblems, logos, and batch information. Additionally, it offers job work services for laser marking and chemical etching, meeting client specifications.
BOSE Signature, headquartered in New Delhi, India, is a manufacturer and supplier of qualitative assortment of stainless steel weld cleaning machine and electrochemical etching machines and consumables. Its product line includes machines like manual and semi-automatic etching, electrochemical and chemical etching machines. The company provides customized solutions for both automatic and plant automaton projects for chemical etching process used in marking numbers, emblems, logos, QR codes, and dates. It also undertakes job work for chemical etching on the basis of customer's requirement.
Masteretch Services, established in 1983, and headquartered in Corby, Northants, UK, is a manufacturer of chemical etching equipment. All models are offered in etching, developing, stripping, and drying configurations, and can be interconnected to create a continuous production line. The systems are designed, assembled in-house at the UK facility, and thoroughly tested before shipment. Its equipments are engineered for maximum efficiency and long-term, high-volume production. The company is also capable of designing and building custom equipment to meet exact etching requirements.
Lam Research Corporation, founded in 1980 and based in Fremont, California, is a global supplier of semiconductor fabrication equipment. Specializing in thin film deposition, plasma etch, and photoresist strip processes, the company utilizes a line of high-precision mass metrology systems, enabling an Å-level quantification to process changes, and accommodating parts up to 8 meters in size. Its products and services enable its customers to build smaller, faster, and power-efficient electronic devices.
Ranking as of December 2024
Derivation Method| Rank | Company | Click Share |
|---|---|---|
| 1 | Hitachi High-Tech America, Inc. |
21.1%
|
| 2 | Masteretch Services |
12.0%
|
| 3 | Videojet Technologies, Inc. |
9.9%
|
| 4 | Samco Inc |
9.2%
|
| 5 | LAM RESEARCH CORPORATION |
7.0%
|
| 6 | SHIBAURA MECHATRONICS CORPORATION |
7.0%
|
| 7 | BOSE Signature |
6.3%
|
| 8 | SHOWA SHINKU CO., LTD. |
4.9%
|
| 9 | SUMITOMO PRECISION PRODUCTS Co., Ltd. |
4.2%
|
| 10 | SHINKO SEIKI CO., LTD. |
3.5%
|
Derivation Method
The ranking is calculated based on the click share within the etching equipment page as of December 2024. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.Number of Employees
Newly Established Company
Company with a History
*Including some distributors, etc.
*Including some distributors, etc.
| Country | Number of Companies | Share (%) |
|---|---|---|
|
Japan
|
9 | 64.3% |
|
United States of America
|
2 | 14.3% |
|
India
|
2 | 14.3% |
|
United Kingdom
|
1 | 7.1% |
37 products found - Page 2
37 products - Page 2
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■Summary The batch type natural oxide film removal device RISETM-300 is a batch type pre-clean device that can remove difficult natural oxide films...
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GaN wafer low damage etching equipment ■Light source wavelength UVA UVC selectable ■Heating function Fast and deep etching possible by heating th...
