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Sputtering Components Japan Co., Ltd.'s Chemical Vapor Deposition (CVD) Systems

Sputtering Components Japan Co., Ltd.

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PECVD COPRA Linear Sources for large substrates-Sputtering Components Japan Co., Ltd.

Sputtering Components Japan Co., Ltd.

PECVD COPRA Linear Sources for large substrates

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■Features ・Less substrate damage because ion energy does not increase in proportion to power level ・The applicable vacuum range is wide from 1x10...



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