4 registered Plasma Etching Systems of SHINKO SEIKI CO., LTD.
SHINKO SEIKI CO., LTD.
EXAM is a multipurpose plasma etching device that can handle multiple purposes that make use of the know -how of semiconductor product devices. Mul...
SHINKO SEIKI CO., LTD.
The surface wave plasma (SWP), which can generate a large area of high -density plasma, is used for many purposes such as assing and surface trea...
SHINKO SEIKI CO., LTD.
SERIO is a high -density plasma etched device equipped with high density ICP plasma sauce. The proprietary development process has achieved high ve...
SHINKO SEIKI CO., LTD.
It is a new multi -chamber type etching device that can equip multiple etching rooms. Equipped with 2 newly developed ICP etching chamber ・ This d...