SHINKO SEIKI CO., LTD.'s Plasma Etching Systems

4 registered Plasma Etching Systems of SHINKO SEIKI CO., LTD.

SHINKO SEIKI CO., LTD.

Plasma etching device EXAM

EXAM is a multipurpose plasma etching device that can handle multiple purposes that make use of the know -how of semiconductor product devices. Mul...


1 model listed

SHINKO SEIKI CO., LTD.

High density plasma device SWP

The surface wave plasma (SWP), which can generate a large area of ​​high -density plasma, is used for many purposes such as assing and surface trea...


1 model listed

SHINKO SEIKI CO., LTD.

ICP Plasma etching device Serio

SERIO is a high -density plasma etched device equipped with high density ICP plasma sauce. The proprietary development process has achieved high ve...


1 model listed

SHINKO SEIKI CO., LTD.

Plasma processing device multi -chamber ICP etching device

It is a new multi -chamber type etching device that can equip multiple etching rooms. Equipped with 2 newly developed ICP etching chamber ・ This d...


1 model listed


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